Back to results
US 4,785,220 AGranted
Multi-cathode metal vapor arc ion source
OwnerIan G. Brown, Robert A. MacGillinventors
Life of this patent
Estimating the term…
Abstract
An ion generating apparatus utilizing a vacuum chamber, a cathode and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam. One embodiment of the appaatus utilizes a multi-cathode arrangement for interaction with the anode.
Claims10
An apparatus for generating an ion beam comprising:
- a. a vacuum enclosure;
- b. a support member having at least a movable portion located in said vacuum chamber;
- c. a plurality of cathodes located on said movable portion of said support member, said plurality of cathodes being spaced from one another on said movable portion of said support member;
- d. an anode located in one region of said vacuum chamber;
- e. means for transporting said movable portion of said support member and any one of said plurality of cathodes located on said support member to a selected distance from said anode in said one region of said vacuum chamber;
- f. a source of electrical power defining an electrical potential between said one of said cathodes and said anode;
- g. means for producing an electrical arc between said one of said cathodes, located a selected distance from said anode, and said anode sufficient to vaporize and ionize a portion of said cathode to form a plasma;
- h. means for guiding said plasma away form said one of said cathodes and anode in said one region of said vacuum chamber, in a predetermined direction to another region of said vacuum chamber spaced from said one of said cathodes and said anode;
- and
- i. means for extracting ions from said plasma in said another region of said vacuum chamber spaced from said one of said cathodes and said anode.
7 more elements
Dependencies are inferred from the claim text.