Method of producing a passive optical device including at least one reflection grating
AssigneeKernforschungszentrum Karlsruhe GmbH
InventorsWolfgang Ehrfeld, Dietrich Munchmeyer
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Abstract
A method of producing a passive optical device having optical components including at least one reflection grating, at least one port for polychromatic light and a plurality of ports for monochromatic light. The method includes producing the optical components of the device utilizing X-ray depth lithography so that the grating lines of the reflection grating are parallel to the direction of X-ray radiation emitted as part of the X-ray depth lithography.
Claims9
Method of producing a passive optical device having optical components including at least one reflection grating, at least one port for polychromatic light and a plurality of ports for monochromatic light, comprising:
- producing the optical components of said device utilizing X-ray depth lithography so that the grating lines of the reflection grating are parallel to the direction of X-ray radiation emitted as part of said X-ray depth lithography.
Dependencies are inferred from the claim text.