US 4,784,481 A · Transmitted and/or incident light microscope

Abstract

Transmitted-light and/or reflected-light microscope in closed or open vertical-frame stand design (1; 2) having a vertical object stage plane (5) and a horizontal optical microscope axis (7) which is perpendicular to the object stage (5). An alternative embodiment of the microscope casing comprises at least two vertical stand parts (11; 12) which are connected together by a stand plate (13) and--as seen by the observer (47)--are arranged one behind the other. A vertical object stage (5), to which the horizontally-extending optical axis (7) is perpendicular, is located between the two stand parts (11; 12). The angular deflection .alpha. between the vertical plane (63) and the object stage plane, and thus the angular deflection between the horizontal and the optical axis (7), can be up to 30.degree. in both versions, according to the condition: 0.degree..ltoreq..alpha..ltoreq.30.degree.. In all embodiments, contamination-free handling and inspection of large-surface-area objects (6), particularly wafers, is achieved by the establishment of a laminar flow, acting in the region of the object. The observer (47) can carry out all necessary microexamination and handling functions from ergonomically-designed control panels (45, 55), which are all located outside of the critical object region on the instrument. The instrument system can be employed in fully-automated, in-process computer-controlled wafer inspection, measuring and handling lines as a central component.

Claims30

Dependent claims

A transmitted-light or reflected-light microscope, wherein:

(a) the microscope has a casing which comprises a frame stand in open or closed design having--from the view of the observer--a base, a front frame stand part and a rear frame stand part;
(b) an object stage for receiving or holding objects to be viewed, is located between the front and the rear frame stand parts;
(c) the portion of the microscope's optical axis oriented toward objects to be viewed lies perpendicular to the object stage plane and forms a discrete angle .alpha., between 0.degree. and 30.degree. with the horizontal, and
(d) a plurality of air openings are arranged in the upper region of the frame stand base or the lower region of a stand cover plate, and said openings are in communication with means for establishing a flow of room air therethrough.

1 more element

Dependencies are inferred from the claim text.

Transmitted and/or incident light microscope

Life of this patent

Transmitted and/or incident light microscope

Life of this patent

Abstract

Claims30