Heat-generating resistor and heat-generating resistance element using same
AssigneeCanon Kabushiki Kaisha
InventorsMasao Sugata, Tatsuo Masaki, deceased, Hirokazu Komuro, Shinichi Hirasawa, Yasuhiro Yano
Life of this patent
Estimating the term…
Abstract
A heat generating resistor having a functional thin film comprising an amorphous material containing halogen atoms and hydrogen atoms non-uniformly distributed in a matrix of carbon atoms formed on a substrate. Optionally, the thin film also contains silicon and/or germanium, and a substance for controlling the electroconductivity of the thin film. The optional ingredients are also non-uniformly distributed within the thin film.
Claims29
A heat-generating resistor, having a functional thin film comprising an amorphous material containing halogen atoms and hydrogen atoms in a matrix of carbon atoms formed on a substrate, wherein said halogen atoms and/or hydrogen atoms are distributed nonuniformly in the film thickness direction in said functional thin film.
Dependencies are inferred from the claim text.