Preparation of silicon and germanium hydrides containing two different group 4A atoms
AssigneeSolarex Corporation
InventorBenjamin F. Fieselmann
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Abstract
A method for preparing a hydride containing at least two different Group 4A atoms wherein at least one of the Group 4A atoms is silicon or germanium. The method includes the steps of reacting an alkali metal and a macrocyclic compound with a silicon or germanium hydride to form a salt. The salt is then reacted with a Group 4A halide. The resulting hydrides are useful as deposition feedstock material for use in the formation of hydrogenated amorphous silicon alloy in the fabrication of photovoltaic devices and other semiconductor devices.
Claims15
A method for preparing a hydride containing at least two different Group 4A atoms, wherein at least one of said Group 4A atoms is silicon or germanium, said method comprising the steps of:
- (a) reacting an alkali metal and a macrocyclic compound selected to be able to hold said alkali metal to form a reaction product and then reacting said reaction product with a silicon hydride or a germanium hydride to form a salt;
- and
- (b) reacting said salt formed in step (a) with a Group 4A halide containing a different Group 4A atom.
A method for preparing a silicon germanium hydride, comprising the steps of:
- (a) reacting an alkali metal and a macrocyclic compound selected to be able to hold said alkali metal to form a reaction product and then reacting said reaction product with a silicon hydride or a germanium hydride to form a salt;
- and (b) reacting said salt formed in step (a) with a silicon halide or a germanium halide selected so that one of the hydride or halide contains silicon and the other contains germanium.
A method for preparing a silicon carbon hydride comprising the steps of:
- (a) reacting an alkali metal and a macrocyclic compound selected to be able to hold said alkali metal to form a reaction product and then reacting said reaction product with a silicon hydride to form a salt;
- and (b) reacting said salt formed in step (a) with an organic halide.
Dependencies are inferred from the claim text.