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AssigneeInternational Business Machines Corporation
InventorsArup Bhattacharyya, Michael L. Kerbaugh, Robert M. Quinn, Jeffrey A. Robinson
Estimating the term…
Spacers are formed having widths that vary as a function of the spacing between the mandrels upon which the conformal material that defines the spacers is deposited and etched. As the spacing between adjacent mandrels decreases, the width of the resulting spacers decreases. The correlation between mandrel spacing and sidewall structure width is independent of the thickness of the conformal material as-deposited. As the spacing between the mandrels decreases, the decrease in width becomes more pronounced, particularly at mandrel spacings of five microns or less. Thus, by making adjacent mandrels closer together or further apart and adjusting mandrel height, active/passive components having differing widths/lengths may be formed from the same conformal layer.
A method of forming spacers having respective widths that vary from one another on a substrate, comprising the steps of forming mandrels on the substrate at respective varying distances from one another, at least some of said respective varying distances being less than approximately five microns, depositing a conformal layer on said mandrels, and anisotropically etching said conformal layer to provide said spacers.
A method of forming a first set of spacers having first widths and a second set of spacers having second widths greater than said first widths on a substrate, comprising the steps of:
Dependencies are inferred from the claim text.