Interactive multiaxis encoder positioning system
AssigneeKulicke and Soffa Industries, Inc.
InventorsJames M. Weaver, Dipak I. Patel
Life of this patent
Estimating the term…
Abstract
An interactive multiaxis encoder positioning system is provided for positioning a tool or a work piece to a degree of accuracy which is only limited by the encoder system and not the mechanical guides, slides and bearings of prior art systems. A highly precise and accurate multiaxis scale comprising a plurality of sets of grading indicia is made under accurate manufacturing conditions. The multiaxis scale is attached to a fixed or a moving part of the machine or apparatus and is positioned juxtaposed encoder means to provide relative movement to the grating scale means. Thus, the accuracy of positioning a tool or work holder is determined by the accuracy of the encoder and not by the accuracy of the mechanical positioning guides, slides and bearings.
Claims10
An interactive multiaxis encoder positioning system comprising:
- fixed support means,
- movable support means,
- multiaxis scale means mounted on one of said support means for relative movement to a sensor in a plurality of directions,
- at least two of said plurality of directions of movement being orthogonal to each other,
- said multiaxis scale means comprising sets of readable indicia having gratings of parallel lines that are manufactured on a common base as an integral unit and are orthogonal to each other,
- said gratings of parallel lines being constructed to the predetermined accuracy of linearity and orthogonality desired when positioning said movable support means,
- encoder sensor means mounted on the other of said support means for sensing relative movement of said sets of indicia,
- servo motor means for moving said movable support means,
- control means coupled to said servo motor means and to said encoder sensor means for positioning said gratings of parallel lines relative to said encoder sensor means independant of misalignment of said movable support means to said fixed support means.
An interactive multiaxis encoder positioning system for accurately positioning a tool relative to a work piece in two orthogonal directions, comprising:
- a fixed frame,
- a movable frame mounted on said fixed frame for supporting either the tool or work piece,
- a multiaxis encoder scale mounted on said movable frame and movable therewith,
- said multiaxis encoder scale comprising a field of X grating lines having a length and width larger than the predetermined movement of the tool or work piece and a field of Y grating lines having a width and length larger than the predetermined movement of the tool or work piece,
- said X grating lines and said Y grating lines of said encoder scale being constructed to the predetermined accuracy of linearity and orthogonality desired when positioning the tool or work piece,
- a first linear encoder sensor positioned juxtaposed said X grating lines for generating electric signals indicative of relative movement to said X grating lines,
- a second linear encoder sensor fixed relative to said first linear encoder and being positioned juxtaposed said Y grating lines for generating electric signals indicative of relative movement of said encoder to said Y grating lines,
- servo motor means for moving said multiaxis encoder scale or said encoder sensor relative to said fixed frame,
- control means coupled to said servo motor means and said linear encoder sensors for moving said multiaxis encoder scale and said tool or work piece to a predetermined position relative to said X and said Y grating lines independent of misalignment of said movable frame to said fixed frame.
Dependencies are inferred from the claim text.