Wafer carrier for a semiconductor device fabrication, having means for sending clean air stream to the wafers stored therein

A carrier for storing a plurality of semiconductor wafers in spaced parallel relation comprising:

• a storing chamber having a top plate, a pair of side plates and a bottom plate,
• said side plates having means for supporting a plurality of semiconductor wafers in spaced drelation therebetween,
• said storing chamber being open at both ends and partially open at the bottom
• a housing,
• means connecting said housing to said storing chamber with said housing closing one open end of said storing chamber and defining an air duct adjacent said one end of said storing chamber,
• said housing mounting an air filter between said air duct and said one end of said storing chamber and an electric fan and providing an air inlet to said fan and an outlet from said fan to said air duct and said filter to provide a laminar air flow, and
• an electric power source for said fan, whereby said electric fan will generate a flow of air into said air ducts and through said air filter thereby forming a laminar flow of filtered air across the surfaces of said plurality of spaced semiconductor wafers toward the other open end of said storing chamber.