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AssigneeThe BOC Group, Inc.
InventorsAbraham I. Belkind, Erik Bjornard, James J. Hofmann, Donald V. Jacobson, Steven J. Nadel
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A method for depositing a protective coating by cathode sputtering of an alloy of aluminum and silicon in a reactive gas is disclosed. The sputtering target contains sufficient silicon to produce an amorphous coating; 6 to 18 percent silicon is preferred. Targets of approximately 88% aluminum and 12% silicon are especially preferred. Oxygen, nitrogen, compounds of oxygen and compounds of nitrogen are preferred reactive gases. A range of combinations of oxygen and nitrogen are particularly preferred. The method provides durable transparent coatings which may be used as an overcoating for a metal or dielectric coating to provide increased resistance to abrasion and corrosion. In particular, the protected coating may be a metal, dielectric or dielectric-metal-dielectric coating as used in double-glazed window units for buildings or vehicles.
A method for depositing a coating and a protective overcoating on a substrate comprising:
A method for depositing a transparent coating on a substrate comprising:
A coated article comprising a substrate, a coating on the substrate, and a protective overcoating on the coating where the overcoating comprises an amorphous dielectric layer of reaction products formed by sputtering a target in a reactive gas wherein the target is an alloy comprising aluminum and silicon.
A coated article comprising a substrate and an amorphous dielectric coating of reaction products formed by sputtering a target comprising an alloy of aluminum and 6 to 18 percent silicon in a reactive gas.
Dependencies are inferred from the claim text.