Radiation-sensitive polymers
AssigneePolytechnic Institute of New York
InventorsRong-Chang Liang, Subhash Narang, Arnost Reiser
Life of this patent
Estimating the term…
Loading patent…
AssigneePolytechnic Institute of New York
InventorsRong-Chang Liang, Subhash Narang, Arnost Reiser
Estimating the term…
This invention relates to the preparation of solvent soluble polymeric materials which become insoluble in solvents after exposure to actinic light, x-rays or electron beams. The polymers are linear block copolymers comprising two segments; a soft segment which forms a continuous phase, and a rigid, crystallizable photoreactive segment which forms a dispersed phase. The rigid segments are chosen from polyurethanes, polyesters, polyamides, and polyureas which contain a diacetylene group in their repeat units. The soft segments are low molecular weight rubbery polymers selected from groups such as polyethers, polyesters, polydienes, and polysiloxanes. The polymers produced are useful in a wide variety of applications in the field of coatings and graphic arts. More particularly, this invention relates to negative photoresists which are remarkable by their (1) high photosensitivity (2) great latitude in tailoring of film properties, (3) high thermal stability and (4) oxygen insensitivity.
A radiation sensitive linear block copolymer suitable for providing a solvent-insoluble product, said linear block copolymer comprising at least two types of segments, A and B, wherein segment A is a rigid and radiation sensitive segment comprising a prepolymer containing diacetylene groups, segment A being one selected from the group consisting of ##STR30## and wherein segment B is a soft rubbery segment comprising a prepolymer, segment B being one selected from the group consisting of ##STR31## wherein R, R.sup.1 are the same or different and are selected from the group consisting of aliphatic, cycloaliphatic, and aromatic divalent groups of from 2 to 20 carbon atoms,
A radiation sensitive linear block copolymer suitable for providing a solvent-insoluble product, said linear block copolymer comprising at least two types of segments A and B, wherein
Dependencies are inferred from the claim text.