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AssigneeThe Foxboro Company
InventorsGordon W. Chitty, Richard H. Morrison, Jr., Everett O. Olsen, John G. Panagou, Paul M. Zavracky
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Microminiature resonant sensor structures are prepared according to micromachining/microfabrication techniques, which structures include thin-film deposits of piezoelectric materials. Such piezoelectric deposits may be excited electrically by including metallized conductive paths during fabrication, or optically. The resonant frequency of the sensor structure is varied by subjecting it to a physical variable, or measurand, such as pressure, temperature, flow rate, etc. Similarly, the resonant frequency of the devices may be detected electrically or optically. The microminiature resonant structures include ribbons and wires, hollow beam and cantilevered hollow beams, and single- and double-ended double beam resonant structures such as tuning forks.
A method of fabricating a laminar resonant structure, comprising the steps of:
A method of preparing a laminar resonant structure, comprising the steps of:
A method of preparing a hollow beam resonant structure comprising the steps of:
A microfabricated laminar resonant microstructure for use in sensing a measurand, fabricated by the steps of:
A microfabricated resonant microstructure for use in sensing a measurand, fabricated by the steps of:
Dependencies are inferred from the claim text.