Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom
AssigneeAdvanced Technology Materials, Inc.
InventorsGlenn M. Tom, Duncan W. Brown
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Abstract
A process for purifying a gaseous mixture comprising arsine, phosphine, ammonia, and/or inert gases, to remove Lewis acid and/or oxidant impurities therefrom, comprising contacting the mixture with a scavenger including a support having associated therewith an anion which is effective to remove such impurities, such anion being selected from one or more members of the group consisting of: (i) carbanions whose corresponding protonated compounds have a pK.sub.a value of from about 22 to about 36; and (ii) anions formed by reaction of such carbanions with the primary component of the mixture.
Claims19
A scavenger, having utility for purifying a gaseous mixture comprising (i) a primary component selected from one or more members of the group consisting of arsine, phosphine, ammonia, and inert gases, and (ii) impurities selected from one or more members of the group consisting of Lewis acids and oxidants, said scavenger comprising:
- (a) a support having a surface area in the range of from about 50 to about 1000 square meters per gram of support;
- and
- (b) associated with, but not covalently bonded to, said support, an anion which is reactive to effect the removal of said impurities from said gaseous mixture, said anion being selected from one or more members of the group consising of:
- (1) carbanions whose corresponding protonated compounds have a pK.sub.a value of from about 22 to about 36;
- and
- (2) anions formed by reaction of said carbanions with the primary component of said mixture.
Dependencies are inferred from the claim text.