Magnetic bubble memory device
AssigneeHitachi, Ltd.
InventorsMasatoshi Takeshita, Hiroshi Umezaki, Ryo Suzuki, Takashi Toyooka, Teruaki Takeuchi, Naoki Kodama
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Abstract
A hybrid magnetic bubble memory device comprising soft magnetic material propagation tracks and ion-implanted propagation tracks. In the soft magnetic material propagation track region, a layer made of a heat-resistant polymer was provided as an interlaminar insulating layer between a conductor and a pattern of a soft magnetic material. An insulator film made of a heat-resistant polymer was provided on the pattern made of a soft magnetic material. A passivation film made of an inorganic material was provided on the ion-implanted propagation tracks and the insulator film made of a heat-resistant polymer.
Claims6
In a magnetic bubble memory device comprising:
- a magnetic film capable of supporting a magnetic bubble;
- a first insulator film made of an inorganic material;
- a first magnetic bubble propagation track region comprising a conductor pattern, a second insulator film made of a heat-resistant polymer and a pattern made of a soft magnetic material formed on said second insulator film;
- a second magnetic bubble propagation track region having ion-implanted propagation tracks which have been formed by selectively implanting an ion into desired regions in said magnetic film;
- the improvement wherein a third insulator film made of a heat-resistant polymer is provided on said second insulator film and said pattern made of a soft magnetic material;
- and
- wherein a passivation film made of an inorganic material is provided on said third insulator film and said first insulator film at portions of the first insulator film located in said second magnetic bubble propagation track region.
A magnetic bubble memory device comprising:
- a magnetic film supporting magnetic bubbles;
- a first magnetic bubble propagation track region comprising ion-implanted propagation tracks formed by selectively implanting ions into desired portions of said magnetic film, and a first insulator film made of SiO.sub.2 on said magnetic film;
- a second magnetic bubble propagation track region comprising said first insulator film on said magnetic film, conductor patterns on said first insulator film, a second insulator film made of a heat-resistant polymer on said conductor patterns, soft magnetic material patterns on said second insulator film and a third insulator film made of a heat-resistant polymer on said second insulator film and said soft magnetic material patterns;
- and
- a passivation film made of SiO.sub.2 on said first insulator film in said first magnetic bubble propagation track region, and on said second insulator film and said third insulator film in said second magnetic bubble propagation track region.
Dependencies are inferred from the claim text.