Superprecision positioning device

A superprecision positioning device, comprising:

• a bearing base cylinder;
• a plurality of eccentric shaft rotors supported by said bearing base cylinder, including at least an outer eccentric shaft rotor and an inner eccentric shaft rotor;
• said outer eccentric shaft rotor having a cylindrical inner wall and a cylindrical outer wall eccentric with respect to one another, wherein said outer eccentric shaft is rotatably supported by a bearing within a cylindrical inner wall of said bearing base cylinder;
• said inner eccentric shaft rotor having a cylindrical inner wall and a cylindrical outer wall eccentric with respect to one another, wherein said inner eccentric shaft is rotatably supported by a bearing within said cylindrical inner wall of said outer eccentric shaft rotor;
• an output shaft rotor rotatably supported by a bearing within said cylindrical inner wall of said inner eccentric shaft rotor;
• a first electric rotational drive means disposed on said bearing base cylinder and said outer eccentric shaft rotor, for directly rotating said outer eccentric shaft rotor with respect to said bearing base cylinder;
• a second electric rotational drive means, disposed on said inner and outer eccentric shaft rotors, for directly rotating said inner eccentric shaft rotor with respect to said outer eccentric shaft rotor;
• and
• a third electric rotational drive means, disposed on said inner eccentric shaft rotor and said output shaft rotor, for directly rotating said output shaft rotor with respect to said inner eccentric shaft rotor, such that said outer eccentric shaft rotor, said inner eccentric shaft rotor, and said output shaft rotor are each rotatable independently from one another.