Photoselective electroless plating method employing UV-absorbing substrates
AssigneePacific Bell
InventorCharles E. Baumgartner
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Abstract
A process for photoselective electroless plating is disclosed in which a semiconductor substrate (e.g. barium titanate) capable of absorbing light having a wavelength greater than 300 nm is coated with a solution containing the salt of tin, titanium, or lead (e.g. SnCl.sub.2). The coated substrate is then selectively exposed to light having a wavelength of 300-390 nm in a negative pattern; the light energy absorbed by the substrate is transferred to the coating, changing the oxidation state of the metal ion of the metal salt rendering it incapable of reducing palladium ions in a palladium chloride solution. Coating with a precious metal salt (e.g., PdCl.sub.2) and nickel disposition follow the light exposure step.
Claims7
A method for photoselective metal deposition of a precious metal chosen from the group consisting of palladium, platinum, gold, silver, osmium, indium, iridium, rhenium, and rhodium, said method comprising the steps of:
- providing a semiconductor substrate for receiving said previous metal said substrate including a material capable of absorbing light having a wavelength greater than 300 nm and transferring energy to metal ions of a salt of a metal chosen from the group consisting of tin, titanium, and lead, the oxidation state of the metal ion thereof being alterable by exposure to light having a wavelength less than 300 nm;
- coating the surface of said substrate with a solution containing a salt of a metal selected from the group consisting of tin, titanium, and lead, the oxidation state of the metal ion thereof being alterable by exposure to light having a wavelength less than 300 nm, the oxidation state of said metal ion remaining substantially unaltered when said solution is exposed to light having a wavelengths greater than 300 nm;
- exposing the regions of said substrate which are not to receive said precious metal to light having a wavelength less than 390, but greater than 300 nm;
- and
- exposing said substrate to a solution of the salt of said precious metal.
Dependencies are inferred from the claim text.