US 4,738,693 AGranted

Valve block and container for semiconductor source reagent dispensing and/or purification

AssigneeAdvanced Technology Materials, Inc.

InventorGlenn M. Tom

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Abstract

A valve block leak-tightly joinable to a receptacle to form a container suitable for liquid storage/vapor dispensing, and gas purification applications. The valve block is provided with first and second valve ports with which valves may be employed to flow feed gas through the valve block and receptacle. To effect purging the valve block ports and gas flow passages, the valve block is provided with a purge valve port which may be opened while the first and second valve ports are closed, to remove dead space hold-up gas from the respective ports and flow passages of the block prior to initiation of vapor dispensing or gas purification operation. The disclosed container is particularly advantageous for dispensing or purifying source reagent compounds for elements of Group III and Group V, in semiconductor manufacturing applications.

A valve block, comprising:

(a) a block leak-tightly joinable at its bottom face to a receptacle and having top, bottom, front, rear and side faces;
(b) an inlet in the top face of the block for introducing fluid thereto;
(c) an outlet in the top face of the block for discharging fluid therefrom, in spaced relationship to said inlet,
(d) a first valve port in a first side face of the block;
(e) a second valve port in a second side face of the block;
(f) a third valve port in the front face of the block;
(g) a first fluid flow passage joining the inlet and the first valve port;
(h) a second fluid flow passage joining the first valve port and the bottom face of the block;
(i) a third fluid flow passage joining the first valve port and the third valve port;
(j) a fourth fluid flow passage joining the third valve port and the second valve port;
(k) a fifth fluid flow passage joining the second valve port and the bottom face of the block, and in spaced relationship to the second fluid flow passage;
(l) a sixth fluid flow passage joining the second valve port and the outlet;
the respective fluid flow passages at each of said respective valve ports being positioned relative to one another whereby independently operable valves disposed in said valve ports and operable to provide selected open or closed valve positions provide:
(A) when said third valve port valve is closed and said first and second valve port valves are open, sequential fluid flow from said inlet through only said first fluid flow passage, first valve port, second fluid flow passage, said receptacle, sixth fluid flow passage, and said outlet;
and
(B) when said third valve port valve is open and said first and second valve port valves are closed, sequential fluid flow from said inlet through only said first fluid flow passage, first valve port, third fluid flow passage, third valve port, fourth fluid flow passage, second valve port, sixth fluid flow passage, and said outlet.

13 more elements

Abstract

Claims21