Removable pellicle and method
OwnerYung-Tsai Yeninventor
Life of this patent
Estimating the term…
Abstract
A composite frame for a free-standing membrane is provided. The frame includes a first frame member which is to be mounted to a planar surface such that a working area is defined on the planar surface, a second frame member for peripherally supporting the membrane, and a removable mounting between the first and second frame members so that the membrane protects and covers the working area. Another aspect of the disclosure is a method for using a pellicle, which includes the steps of mounting a first frame member to a planar surface such that a working area is defined, and then removably mounting a pellicle to the first frame member so that the working area is protected by the pellicle.
Claims18
A composite frame for a free-standing, protective membrane comprising:
- a first frame member;
- means for mounting said first frame member to a planar surface such that a working area is defined on the surface within said first frame member;
- a second frame member having a first side for peripherally supporting the membrane, and a second side;
- and
- means for removably mounting said second side of said second frame member to said first frame member so that the membrane protects and covers the working area.
A framed free-standing membrane comprising:
- a membrane;
- a first frame member encompassing and defining a working area corresponding to that of said membrane;
- a second frame member of configuration corresponding to that of said first frame member;
- means for peripherally mounting said membrane to a first side of said second frame member;
- and
- means for removably mounting a second side of said second frame member to a first side of said first frame member.
A method of using a pellicle comprising:
- mounting a first frame member to a photomask surface such that a working area is encompassed and defined on the photomask within the frame member;
- removably mounting a pellicle to the first frame member so that the working area is protected by the pellicle;
- subsequently removing the pellicle from the first frame member while maintaining the first frame member in position on the planar surface;
- and
- removably mounting a replacement pellicle to the first frame member.
Dependencies are inferred from the claim text.