Micro-miniature accelerometer

An accelerometer, comprising:

• a substrate;
• a sensing element comprising a metallic member;
• mounting means for mounting the sensing element above the substrate, the mounting means comprising a pedestal connected between the substrate and the sensing element, the pedestal dividing the sensing element into a first beam to one side of the pedestal and a second beam on the opposite side of the pedestal, each beam being adapted to flex towards and away from the substrate in response to acceleration normal to the substrate;
• first and second electrodes mounted by the substrate adjacent the first and second beams respectively, the first electrode and first beam together forming a first capacitor, the second electrode and second beam together forming a second capacitor, and the first and second beams and first and second electrodes being arranged such that the capacitances of the first and second capacitors change by different amounts in response to acceleration normal to the substrate;
• and
• detection means coupled to the first and second capacitors for sensing differential change in said capacitors.

An accelerometer for measuring acceleration along a sensitive axis, comprising:

• (a) an inertial mass;
• (b) mounting means for mounting the inertial mass such that the inertial mass tends to move in response to acceleration along the sensitive axis;
• (c) first and second capacitors associated with the inertial mass such that when the inertial mass moves, the capacitances of the first and second capacitors change by unequal amounts, each of the first and second capacitors comprising first and second plates;
• and
• (d) detection means for measuring the relative capacitances of the first and second capacitors and providing a corresponding output signal, the detection means comprising:
• (i) means for providing first and second reference voltages;
• (ii) an output terminal at which the output signal is produced;
• (iii) an inverting amplifier having its input connected to the output terminal;
• (iv) an integrator having its output connected to the output terminal;
• (v) a first switch having a common terminal and A and B terminals, the common terminal of the first switch being connected to the first plates of the first and second capacitors, the A terminal of the first switch being connected to receive the first reference voltage and the B terminal of the first switch being connected to the input of the integrator;
• (vi) a second switch having a common terminal and A and B terminals, the common terminal of the second switch being connected to the second plate of the first capacitor, the A terminal of the second switch being connected to the output of the inverting amplifier, and the B terminal of the second switch being connected to receive the second reference voltage;
• (vii) a third switch having a common terminal and A and B terminals, the common terminal of the third switch being connected to the second plate of the second capacitor, the A terminal of the third switch being connected to receive the second reference voltage, and the B terminal of the third switch being connected to the output terminal;
• and
• (viii) means for causing the first, second and third switches to periodically change in concert between state A wherein all switches connect their common terminals to their A terminals and state B wherein all switches connect their common terminals to their B terminals.

An accelerometer, comprising:

• a substrate;
• a sensing element comprising a metallic member, the sensing element including an internal opening;
• mounting means positioned within said opening for mounting the sensing element such that the sensing element is positioned above the substrate and can rotate about a flexure axis that is above and substantially parallel to the substrate, the mounting means comprising a pedestal mounted to the substrate and flexible support means connected between the sensing element and the pedestal, the support means comprising an element surrounding the pedestal, a beam extending between the pedestal and the element, and a pair of torsion members extending in opposite directions from the element to the sensing element, the flexure axis dividing the sensing element into a first section on one side of the flexure axis and a second section on the opposite side of the flexure axis from the first section, the total moments of the first and second sections about the flexure axis being different from one another, whereby acceleration normal to the substrate tends to rotate the sensing element about the flexure axis;
• and
• means for sensing rotation of the sensing element about the flexure axis.