Method and apparatus for operating one or more deposition systems
AssigneeEnergy Conversion Devices, Inc.
InventorJoachim Doehler
Life of this patent
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Abstract
There are disclosed a method and apparatus for improved operation of one or more deposition systems. A minimum expenditure malfunction recovery system provides for a variable recovery related to the current hardware and actual states of the system. A simplified input and output (I/O) device is provided to control the data flow in the system without addressing and decoding complexity. A flexible operation system is also provided for a plurality of deposition systems whose operation easily can be varied without reprogramming of the operating sequence.
Claims7
A method of providing a flexible multiple deposition operating system, said method comprising:
- providing at least two deposition system programs;
- providing a plurality of service system programs, each said service system program adapted to carry out at least one fabrication task of the deposition system program;
- providing a separate recipe file program, said recipe file program adapted to coordinate interaction between said deposition and service system programs;
- providing a control program which coordinates the interaction between the recipe file program and the deposition and service system program;
- and
- revising only said recipe file program to effect changes in said deposition and service system programs.
An apparatus for providing a flexible, multiple deposition operating system, said apparatus comprising:
- at least two deposition system programs;
- said deposition system programs including a plurality of service system programs, each said service system programs adapted to carry out at least one fabrication task;
- each of said deposition and service system programs including a separate recipe file program adapted to coordinate interaction between said deposition and service system programs;
- control program means adapted to coordinate interaction between the recipe file program and the deposition and service system programs;
- and
- means for revising only said recipe file programs to effect changes in said deposition and service system programs.
Dependencies are inferred from the claim text.