Oxime sulfonates containing reactive groups
AssigneeCiba-Geigy Corporation
InventorsKurt Dietliker, Werner Rutsch, Godwin Berner, Max Hunziker, Christopher G. Demmer
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Abstract
Oxime sulfonates of formula I ##STR1## wherein Y is a polymerizable unsaturated group or epoxide group or an --OH, --NHR.sup.5, --COOH, COOR.sup.6, --COCl, --CH.sub.2 Hal, --SO.sub.2 Cl or --NCO group, Z is an (x+y)-valent connecting member, R.sup.1 and R.sup.2 are monovalent organic radicals, m is 0 or 1, x is 1 or 2 and y is 1 or 2, can be converted into polymers which can be thermally or photochemically dissociated to form free sulfonic acid groups. Said polymers can therefore be used as photoresists which can be developed with aqueous alkalis.
Claims10
A compound of formula I ##STR25## wherein m is 0 or 1,
- x is 1 or 2,
- y is 1 or 2,
- R.sup.1 is C.sub.1 -C.sub.12 -alkyl, C.sub.1 -C.sub.4 -haloalkyl, C.sub.5 -C.sub.12 -cycloalkyl, C.sub.6 -C.sub.10 -aryl or said aryl substituted by one or more of the substituents selected from the group consisting of halogen, C.sub.1 -C.sub.6 -alkyl, C.sub.1 -C.sub.4 -alkoxy, phenoxy, phenyl and nitro, or R.sup.1 is furyl, thienyl, C.sub.7 -C.sub.12 -aralkyl, C.sub.1 -C.sub.8 -alkoxy, C.sub.5 -C.sub.8 -cycloalkoxy, phenoxy or --CN,
- R.sup.2 has one of the meanings indicated for R.sup.1, or R.sup.2 is C.sub.2 -C.sub.6 -alkanoyl, benzoyl, C.sub.2 -C.sub.5 -alkoxycarbonyl, phenoxycarbonyl, --N(R.sup.3)(R.sup.4), morpholino or piperidino, or R.sup.1 and R.sup.2, together with the atoms to which they are attached, form a 5- or 8-membered ring which may be fused with 1 or 2 radicals of the benzene series,
- R.sup.3 is hydrogen, C.sub.1 -C.sub.12 -alkyl, phenyl, C.sub.2 -C.sub.6 -alkanoyl or benzoyl,
- R.sup.4 is hydrogen, C.sub.1 -C.sub.12 -alkyl or cyclohexyl,
- Y is a polymerizable ethylenically unsaturated group selected from the group consisting of vinyloxy, vinyloxycarbonyl, isopropenyloxy, isopropenyloxycarbonyl, allyloxy, allyloxycarbonyl, methallyloxy, methallyloxycarbonyl, acryloxy, methacryloxy, acrylamido, methacrylamido, allylamino, diallylamino, maleinimido and itaconimido;
- or
- Y is an epoxide group of the formula ##STR26## Y is an --OH, --NHR.sup.5, --COOH, --COOR.sup.6, --COCl, --SO.sub.2 Cl or --NCO groups,
- R.sup.5 is hydrogen, C.sub.1 -C.sub.6 -alkyl or phenyl,
- R.sup.6 is C.sub.1 -C.sub.6 -alkyl or phenyl, and
- Z is a 2-, 3- or 4-valent aromatic or aromatic-aliphatic group of the formula ##STR27## Z is straight or branched chain C.sub.1 -C.sub.12 -alkylene, --CH.sub.2 CH.sub.2 OCH.sub.2 CH.sub.2 --, --(CH.sub.2 CH.sub.2 O).sub.2 CH.sub.2 CH.sub.2 --, --CH.sub.2 CH.sub.2 SCH.sub.2 CH.sub.2 -- or --CH.sub.2 CH.sub.2 NHCH.sub.2 CH.sub.2 --, or Z is an aliphatic or cycloaliphatic group of the formula ##STR28##
Dependencies are inferred from the claim text.