US 4,735,878 A · Optically read recording medium and method for making same

Abstract

An information recording medium includes a substrate having first and second sides. A layer of photoresist is deposited on the first side of the substrate. This layer of photoresist has a selected thickness and defines an area of openings therein such that the first side of the substrate is exposed at the openings, the openings being distributed in a pattern indicative of selected stored information. A reflecting layer is deposited on the photoresist layer and on the first side of the substrate at the openings. Both the substrate and the layer of photoresist are adapted to transmit the reading beam such that a portion of the reading beam incident on the second side of the substrate is reflected out of the substrate by the reflecting layer, both in a first region comprising the openings and in a second region between the openings. The selected thickness of the photoresist is chosen to provide destructive interference between the portions of the reading beam reflected out of the substrate by the reflecting layer in the first and second regions. Methods for forming such a recording medium by photolithographic techniques are disclosed.

Claims25

Dependent claims

A method for recording information and for subsequently reading the stored information with a reading beam, said method comprising the following steps:

(a) providing a substrate having first and second sides and comprising a first material which transmits the reading beam;
(b) coating the first side of the substrate with a layer of a photoresist comprising a second material which transmits the reading beam;
(c) exposing portions of the layer of photoresist to create a pattern of first and second regions which differ in exposure;
(d) removing at least a portion of the layer of the photoresist in the first region to create depressions having selected depth;
(e) depositing a reflecting layer over both the depressions and the second region of the layer of photoresist, said reflecting layer comprising a third material which reflects the reading beam;
and
(f) directing the reading beam against the second side of the substrate, through the substrate and the remaining portions of the layer of photoresist, onto the reflecting layer to read the pattern of the first and second regions, said selected depth of said depressions selected to create destructive interference on the second side of the substrate between (a) the portion of the reading beam reflected from the reflecting layer overlying the depressions and (b) the portion of the reading beam reflected from the reflecting layer overlying the second regions of the layer photoresist.

4 more elements

A method for recording information and for subsequently reading the recorded information with a reading beam, said method comprising the following steps:

(a) providing a substrate having first and second sides and comprising a first material which transmits the reading beam;
(b) spin coating the first side of the substrate with a layer of a photoresist comprising a second material which transmits the reading beam;
(c) exposing portions of the layer of photoresist to create a pattern of exposed first regions and unexposed second regions;
(d) removing the layer of photoresist in the exposed first regions to expose the substrate underlying the first regions;
(e) depositing a reflecting layer by vacuum deposition over both the exposed substrate and the second regions of the layer of unexposed photoresist, said reflecting layer comprising a metal which reflects the reading beam;
(f) coating the reflecting layer with a polymer layer to protect the reflecting layer from physical damage;
and
(g) directing the reading beam against the second side of the substrate, through the substrate and the remaining portions of the layer of photoresist, onto the reflecting layer to read the pattern of the first and second regions, the thickness of the layer of photoresist selected to create destructive interference on the second side of the substrate between the portion of the reading beam reflected from the reflecting layer overlying the substrate and the portion of the reading beam reflected from the reflecting layer overlying the second regions of the layer of photoresist.

5 more elements

Dependencies are inferred from the claim text.

Optically read recording medium and method for making same

Life of this patent

Optically read recording medium and method for making same

Life of this patent

Abstract

Claims25