Thermal head and method for fabricating

A method of fabricating a thermal head for printing picture information by selectively supplying power to a heating resistor film of the thermal head so as to heat said film according to said picture information, said method comprises the steps of forming an electrode pattern and forming the heating resistor film, characterized in that therefor the heating resistor film includes a step of forming the tantalum nitride film orientated in (101) direction under a controlled nitrogen partial pressure by a reactive sputtering process.

A method of fabricating a thermal head for printing picture information by selectively supplying power to a heating resistor film of the thermal head so as to heat said film according to said picture information, said method comprising the steps of forming an electrode pattern and forming the heating resistor film, characterized in that the step of forming the heating resistor film includes a step of forming the tantalum nitride film in a hexagonal close-packed lattice orientated in (101) direction under a controlled nitrogen partial pressure of about 1.0.times.10.sup.-2 Pa to about 1.9.times.10.sup.-2 Pa by a reactive sputtering process.