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US 4,734,558 AGranted
Laser machining apparatus with controllable mask
AssigneeNEC Corporation
InventorsMasakazu Nakano, Yoihi Yoshino
Life of this patent
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Abstract
A laser machining apparatus is disclosed. The laser machining apparatus includes a marking table, a laser, a first optical system for converting a laser beam emanating from the laser into a parallel beam, a device for generating a transparent optical aperture by controlling an optical material in either an electrical or an optical manner, a device for directing the parallel beam output from the first optical system toward the optical aperture, and a second optical path for focusing the optical aperture on a sample which is located on the marking table.
Claims13
A laser machining apparatus, comprising:
- a marking table for supporting a workpiece which is to be laser engraved;
- laser means for generating a laser beam for engraving a workpiece on said marking table;
- a first optical system for converting said laser beam into a parallel laser beam;
- means for generating a transparent optical aperture of arbitrary pattern, said optical aperture generating means including a liquid crystal light valve controllable by an electrical or optical signal such that said optical aperature is controllable in pattern;
- means for directing the parallel laser beam output from the first optical system onto said liquid crystal light valve;
- and
- a second optical system for imaging the optical aperture generated by said liquid crystal light valve means onto said workpiece, whereby said parallel laser beam passed by said optically transparent aperture engraves said workpiece in said pattern.
4 more elements
Dependencies are inferred from the claim text.