Supercritical fluid molecular spray thin films and fine powders
AssigneeBattelle Memorial Institute
InventorRichard D. Smith
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AssigneeBattelle Memorial Institute
InventorRichard D. Smith
Estimating the term…
Solid films are deposited, or fine powders formed, by dissolving a solid material into a supercritical fluid solution at an elevated pressure and then rapidly expanding the solution through a short orifice into a region of relatively low pressure. This produces a molecular spray which is directed against a substrate to deposit a solid thin film thereon, or discharged into a collection chamber to collect a fine powder. The solvent is vaporized and pumped away. Solution pressure is varied to determine, together with flow rate, the rate of deposition and to control in part whether a film or powder is produced and the granularity of each. Solution temperature is varied in relation to formation of a two-phase system during expansion to control porosity of the film or powder. A wide variety of film textures and powder shapes are produced of both organic and inorganic compounds. Films are produced with regular textural feature dimensions of 1.0-2.0 .mu.m down to a range of 0.01 to 0.1 .mu.m. Powders are formed in very narrow size distributions, with average sizes in the range of 0.02 to 5 .mu.m.
A method for depositing of a film of solid material, on a surface, comprising:
A method for forming a fine powder of a solid material, comprising:
A method for forming a solid material into one of a thin film and a powder, comprising:
A method for forming a solid material into one of a thin film and a powder, comprising:
A powder product formed by discharging a supercritical solution of a supercritical fluid solvent and a dissolved solute of a mixture of effective amounts of a solid inorganic and a polymeric material as a particulate spray into a low pressure region, said powder product comprising strand-like particles or fibers of said mixture wherein the inorganic and polymeric materials are mixed at a molecular level.
A powder product formed by discharging a supercritical solution of a supercritical fluid solvent and a dissolved solute of a mixture of effective amounts of a solid, inorganic material and a metal salt, soluble in common in said supercritical fluid solvent, as a particulate spray into a low pressure region, said powder product comprising microporous amorphous particles of said mixture wherein the inorganic material and metal salt are mixed at a molecular level.
Dependencies are inferred from the claim text.