Method of manufacture of solar battery
AssigneeFuji Electric Corporate Research and Development Ltd.
InventorMichinari Kamiyama
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Abstract
A solar battery having a plurality of photoelectric conversion elements connected in series. Each element consists of a transparent electrode layer, a non-crystalline semiconductor layer and a metal electrode layer laid one upon another in the stated order. In one embodiment, a site comprising a polycrystalline region is provided in the non-crystalline semiconductor. A conductive element sandwiches the transparent electrode between it and said non-crystalline material directly beneath said site. In another embodiment, a void which is filled with metal from said metal electrode layer connects the metal electrode layer and the underlying transparent electrode. Methods of manufacturing the solar battery including laser irradiation to form the polycrystalline region or void are disclosed.
Claims10
The method of forming a solar battery comprising the steps of:
- (a) providing a substrate;
- (b) depositing a conductive film on said substrate;
- (c) forming a transparent electrode substantially covering said conductive film;
- (d) depositing a non-crystalline material on said transparent electrode;
- (e) exposing at least one site on the non-crystalline material to light of intensity sufficient to form a low resistance polycrystalline region or a void in said non-crystalline layer;
- and
- (f) forming a metal electrode on said non-crystalline material overlying said site.
Dependencies are inferred from the claim text.