A method for removing at least one predetermined, desired area of a coating from a substrate having said coating thereon, said coating comprising at least one member selected from the group consisting of solvent-insoluble vacuum vapor-phase-deposited, polymerized para-xylylene and solvent-insoluble vacuum vapor-phase-deposited, polymerized, substituted derivatives of para-xylylene, said method comprising contacting said at least one area of the coating to be removed with a substance selected from the group consisting of tetrahydrofuran, dichloromethane, and toluene to loosen the coating on said area sufficiently to permit removal of said area of said coating by physical means.