Method and apparatus for low pressure testing of a solid state pressure sensor
AssigneeMotorola, Inc.
InventorsLee E. Folk, William B. Newton, Robert P. Rossman
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Abstract
The present invention consists of a miniature vacuum chamber that is capable of testing individual dice prior to packaging. The upper portion of the chamber consists of a housing having testing probes and a vacuum inlet disposed therein. The lower portion of the chamber consists of a chuck that holds a wafer and a lower vacuum chamber. The lower portion is indexed to place a dice in contact with the probes. The upper and lower portions then form a seal and a vacuum is drawn in the area defined by the upper and lower chambers. The dice is then tested; the area pressurized; and the chuck indexed to test the next dice.
Claims4
A low pressure testing apparatus for testing a solid state pressure sensor comprising:
- a central plate having a first surface and a second surface, said central plate defining an opening therein extending from said first surface to said second surface;
- probe means for probing said solid state pressure sensor, said probe means having a first surface, a second surface coupled to said first surface of said central plate, and contacts being disposed in the opening defined by said central plate;
- housing means for providing a vacuum seal, said housing means being coupled to said first surface of said probe means;
- vacuum means for removing atmosphere from said low pressure testing apparatus;
- and
- positioning means for positioning said solid state pressure sensor in contact with said probe means, said positioning means being coupled to said second surface of said central plate.
A low pressure testing apparatus for testing a solid state pressure sensor comprising:
- a central plate having a first surface and a second surface, said central plate defining an opening therein extending from said first surface to said second surface;
- probe means for probing said solid state pressure sensor, said probe means having a first surface, a second surface coupled to said first surface of said central plate, and contacts being disposed in the opening defined by said central plate;
- housing means for providing a vacuum seal, said housing means being coupled to said first surface of said probe means;
- lens means for providing radiation access to said solid state pressure sensor, said lens means being disposed in said housing means;
- vacuum means for removing atmosphere from said low pressure testing apparatus;
- positioning means for positioning said solid state pressure sensor in contact with said probe means, said positioning means being coupled to said second surface of said central plate;
- and
- vacuum sealing means being disposed between said second surface of said central plate and said positioning means.
Dependencies are inferred from the claim text.