US 4,733,134 A · Liquid metal ion source with pulse generator control

Abstract

A liquid metal ion source is disclosed, wherein it comprises an ion emitter tip, ion source material holder means holding ion source material for supplying liquid metal ion source material to said ion emitter tip, ion extracting means for extracting ions from said ion emitter tip, when a voltage is applied between the ion extracting means and the ion emitter tip, the pulsing means for pulsing the relative voltage applied between the ion extracting means and the ion emitter tip. A DC voltage corresponding to the threshold voltage V.sub.th for ion beam extraction is applied between the ion emitter tip and the extracting electrode, what permits to extract an ion beam having a high current density by superposing a pulsed voltage on the DC voltage.

Claims5

Dependent claims

A liquid metal ion source comprising:

an ion emitter tip;
ion source material holder means holding ion source material for supplying liquid metal ion source material to said ion emitter tip;
ion extracting means for extracting ions from said ion emitter tip;
and
voltage applying means for applying a voltage between said ion extracting means and said ion emitter tip, said voltage applying means including means providing a DC voltage which is at the neighborhood of the threshold V.sub.th for ion beam extracting from said ion emitter tip, and pulsing means for providing a pulse voltage superposed on said DC voltage so as to provide a pulsed voltage applied between said ion extracting means ans said ion emitter tip whereby a pulsed voltage having good rising and falling characteristics and a pulsed ion beam are obtained.

2 more elements

Dependencies are inferred from the claim text.

Liquid metal ion source with pulse generator control

Life of this patent

Liquid metal ion source with pulse generator control

Life of this patent

Abstract

Claims5