Back to results
US 4,732,792 AGranted
Method for treating surface of construction material for vacuum apparatus, and the material treated thereby and vacuum treatment apparatus having the treated material
AssigneeCanon Kabushiki Kaisha
InventorYasutomo Fujiyama
Life of this patent
Estimating the term…
Abstract
The surface of an element of a vacuum apparatus is coated with a film formed by a flame spraying method.
Claims32
A method for treating the surface of an element subject to vacuum in a vacuum apparatus having a chamber for forming and etching a deposition film on a substrate to be treated, which comprises forming a film on the surface of the element by a flame spraying method.
An element subject to vacuum in a vacuum apparatus having a chamber for forming and etching a deposition film on a substrate to be treated, characterized in that a film is formed on the surface of said element by a flame spraying method.
Dependencies are inferred from the claim text.