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US 4,732,529 AGranted
Turbomolecular pump
AssigneeShimadzu Corporation
InventorsKiyoshi Narita, Jyuichi Kawaguchi
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Abstract
A turbomolecular pump for performing exhaustion by rotating rotors, which pump comprises a blade group consisting of alternately arranged rotors and stators blades and which has a compression ratio raising section in said blade group at a portion on the exhaust port side or an intermediate portion. The compression ratio raising section comprising a rotor whose blade is thicker than a rotor located closer to the suction port side. This turbomolecular pump has good pumping efficiency for lower vacuum range.
Claims5
A turbomolecular pump comprising;
- (a) a housing having a suction port and an exhaust port;
- (b) a pump comprising a group of axial blades which is arranged adjacent to the suction port, wherein the pump consists of a group of rotors and stators arranged alternately;
- and
- (c) a special composite pump arranged in the housing adjacent to the exhaust port, wherein the special composite pump is a combination of a rotor blade body having spiral grooves which are separated by a plurality of ring grooves into multi-stages, said rotor body being formed to be an integral connection of a plurality of cylindrical bodies, and a stator blade body, the blades of which are inserted into the ring grooves of the rotor body.
1 more element
Dependencies are inferred from the claim text.