Automatic dimension analyzer
AssigneeShin-Etsu Engineering Co., Ltd.
InventorsKiyoo Katagiri, Kozo Kasukawa, Shigenaga Manabe
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AssigneeShin-Etsu Engineering Co., Ltd.
InventorsKiyoo Katagiri, Kozo Kasukawa, Shigenaga Manabe
Estimating the term…
An automatic dimension analyzer is disclosed which comprises a power driven table on which an object being measured is placed, the table being movable in orthogonal directions, and an optical system for forming an optical image of the object in a sample point field. The sample point field is electronically scanned in a rectangular raster format to produce sample point data bits each representing a sample point having a predetermined optical level. A cursor generator is synchronized with the raster to generate a cursor in the sample point field. A coincidence detector is provided to detect a coincidence between a sample point data bit and the cursor. Measurement instructions are stored in sequentially addressible locations of a memory through a data entry means. A microprocessor addresses the memory locations to retrieve the instructions to cause one of the table and the cursor to move relative to the other so that sample points derived from the object move toward the cursor and detect the position of the table or cursor relative to a reference upon the detection of a coincidence by the coincidence detector.
An automatic dimension analyzer comprising:
An automatic dimension analyzer comprising:
An automatic dimension analyzer comprising:
An automatic dimension analyzer comprising:
An automatic dimension analyzer comprising:
An automatic dimension analyzer comprising:
An automatic dimension analyzer comprising:
An automatic dimension analyzer comprising:
An automatic dimension analyzer comprising:
A method of analyzing the dimensions of an object placed on a movable table, comprising the steps of:
Dependencies are inferred from the claim text.