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US 4,731,695 AGranted
Capacitor and method for making same with high yield
AssigneeGeneral Electric Company
InventorsRichard Brown, Phillip C. Jozwiak, Saligrama N. Subbarao
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Abstract
A capacitor comprises a pair of electrodes with an insulator between the electrodes. The insulator has a primary dielectric with at least one void. A fill dielectric is in the void to improve yield. A method of making a capacitor comprises forming a first electrode, forming a primary dielectric having a void over the electrode, forming a fill dielectric in the void, and forming a second electrode over the dielectrics.
Claims18
A capacitor comprising:
- a first non-anodizable electrode;
- an insulator overlying said first electrode, said insulator including a primary dielectric having an upper surface and at least one void communicating only with said upper surface, and a fill dielectric disposed in said void;
- and
- a second electrode overlying said insulator.
1 more element
A method for making a capacitor, said method comprising:
- forming a first non-anodizable electrode;
- forming an insulator overlying said first electrode by forming a primary dielectric having an upper surface and at least one void communicating only with said upper surface and forming a fill dielectric in said void;
- and
- forming a second electrode overlying said insulator.
1 more element
Dependencies are inferred from the claim text.