Method for detecting gaseous hydrides
AssigneeJapan Pionics Co., Ltd.
InventorsKoichi Kitahara, Takashi Shimada
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Abstract
A solid detecting reagent for gaseous hydrides and a gaseous hydride detecting method are disclosed, said reagent comprising a basic copper carbonate as a color changing component and undergoing color change upon contact with at least one gaseous hydride selected from the group consisting of arsine, phosphine, diborane, hydrogen selenide, germane, monosilane, disilane and dichlorosilane. The reagent is applicable to all of these gaseous hydrides and, upon contact therewith, rapidly changes from an initial blue color to a black color, said black color standing for a long period of time.
Claims8
A method of detecting gaseous hydrides comprising contacting a solid detecting reagent comprising a basic copper carbonate as a color changing component with a waste gas discharged from a process of production of semiconductors containing at least one gaseous hydride selected from the group consisting of arsine, phosphine, diborane, hydrogen selenide, germane, monosilane, disilane and dichlorosilane and observing a change in color of the detecting reagent.
Dependencies are inferred from the claim text.