Transmissivity inspection apparatus
AssigneesKabushiki Kaisha Toshiba, Toyo Glass Co., Ltd.
InventorsMasahiko Iga, Yoshihiro Yamato, Yoshio Yamaguchi
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Abstract
In a transmissivity inspection apparatus, laser beam is radiated onto an object to be inspected. Irregularly reflected laser light components produced from the object are detected by a photoelectric converter element. The transmissivity of the object with respect to the laser beam is inspected by a discriminator, based on a specific pattern of the irregularly reflected laser light components detected by the photoelectric converter element. The specific pattern of a transparent substance differs from that of a nontransparent substance, thereby to discriminate the nontransparent substance from the transparent substance.
Claims11
A transmissivity inspection apparatus, comprising:
- light source means for supplying coherent light to an object to be inspected;
- reflection detection means for detecting irregular reflection components of the coherent light emitted from said object;
- and
- transmissivity inspection means, coupled to said reflection detection means, for inspecting a transmissivity of said object with respect to said coherent light based on a specific pattern of said irregular reflection components, and generating an inspection signal indicating that said object includes a material having a transmissivity lower than a predetermined transmissivity.
Dependencies are inferred from the claim text.