US 4,730,903 AGranted

Ferroelectric crystal display panel and manufacturing method thereof

AssigneeSemiconductor Energy Laboratory Co., Ltd.

InventorsShunpei Yamazaki, Takashi Inushima, Akira Mase, Toshimitsu Konuma, Mitsunori Sakama

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Abstract

A ferroelectric liquid crystal display having a matrix of ferroelectric liquid crystal elements and nonlinear elements having a diode characteristic in which the liquid crystal elements are connected in series with the nonlinear elements. The first substrate member comprises (a) a transparent first substrate having an insulating surface, (b) a plurality of m.times.n (m>1, n>1) of rectangular transparent conductive layers C.sub.11 to C.sub.1n, C.sub.21 to C.sub.2n, . . . C.sub.m1 to C.sub.mn arranged on the substrate in a matrix form on the first substrate, (c) a layer member A.sub.ij formed on the conductive layer C.sub.ij (where i=1, 2 . . . m and j=1, 2 . . . n) and (d) a stripe-like conductive layer F.sub.i extending in the row direction and making contact with layer member A.sub.i1 to A.sub.in on the side opposite from the conductive layer C.sub.i1 to C.sub.in, wherein the opposing side surfaces a and a' of the layer member A.sub.ij defining is length are substantially aligned with the opposing side surfaces b and b' of the conductive layer C.sub.ij defining its width, respectively, and wherein the opposing side surface b and b' of the layer member A.sub.ij defining its width are substantially aligned with the opposing side surfaces b and b' of the conductive layer F.sub.i defining its width, respectively. The layer member A.sub.ij may be a laminate layer of a first nontransparent conductive layer, non-single-crystal semiconductor layer member or thin insulating layer which permits passage therethrough of tunnel current and a second nontransparent conductive layer.

Claims27

Dependent claims

A liquid crystal display panel comprising:

(A) first and second substrate members disposed opposite at a predetermined distance in substantially parallel relation to each other;
and ferroelectric liquid crystal filled between the first and second substrate members;
(B) wherein the first substrate member comprises (a) a first substrate having an insulating surface, (b) a plurality m.times.n (m>1, n>1) of first conductive layers C.sub.11 to C.sub.1n, C.sub.21 to C.sub.2n, . . . C.sub.m1 to C.sub.mn arranged in a matrix form on the first substrate, (c) a layer member A.sub.ij formed on the first conductive layer C.sub.ij (where i=1, 2 . . . m and j=1, 2 . . . n) and (d) a stripe-like second conductive layer F.sub.1 extending in the row direction and making contact with the layer members A.sub.i1, A.sub.i2, . . . A.sub.in on the side opposite from the first conductive layers C.sub.i1, C.sub.i2 C.sub.i3, . . . C.sub.in, wherein the opposing side surfaces of the layer member A.sub.ij defining its length are substantially aligned with the opposing side surfaces of the first conductive layer C.sub.ij defining its width, respectively, and wherein the opposing side surfaces of the layer member A.sub.ij defining its width are substantially aligned with the opposing side surfaces of the second conductive layer F.sub.i defining its wdith, respectively;
(C) wherein the second substrate member comprises (a) a second substrate having an insulating surface and (b) a plurality n of stripe-like third conductive layers H.sub.1, H.sub.2, . . . H.sub.n sequentially arranged in the row direction on the second substrate and extending in the column direction, the third conductive layer H.sub.j being opposite to the first conductive layers C.sub.ij to C.sub.mj ;
and
(D) wherein the laminate member A.sub.ij constitutes a non linear element U.sub.ij, and a first part of the first conductive layer C.sub.ij on which the layer member A.sub.ij does not extend, a second part of the conductive layer H.sub.j confronting the first part of the first conductive layer C.sub.ij, and a third part of the ferroelectric liquid crystal between the first part of the first conductive layer C.sub.ij and the second part of the second conductive layer H.sub.j constitute a ferroelectric liquid crystal element L.sub.ij.

3 more elements

A liquid crystal display panel comprising:

(A) first and second substrate members disposed oppositely at a predetermined distance in substantially parallel relation to each other;
and
ferroelectric liquid crystal filled between the first and second substrate members;
(B) wherein the first substrate member comprises (a) a first substrate having an insulating surface, (b) a plurality m of stripe-like first conductive layers F.sub.1, F.sub.2, . . . F.sub.m arranged in the column direction of the first substrate and extending in the row direction, (c) a plurality n of layer members A.sub.i1, A.sub.i2, . . . A.sub.in (where i=1, 2, . . . m) formed on the first conductive layer F.sub.1 and (d) a second conductive layer C.sub.ij making contact with the layer members A.sub.ij (where j=1, 2, . . . n) on the side opposite from the first conductive layers F.sub.i, wherein the opposing side surfaces of the second conductive layer C.sub.ij defining its width are substantially aligned with the opposing side surfaces of the layer member A.sub.ij defining its length, respectively;
(C) wherein the second substrate member comprises (a) a second substrate having an insulating surface and (b) a plurality n of stripe-like third conductive layers H.sub.1, H.sub.2, . . . H.sub.n sequentially arranged in the row direction on the second substrate and extending in the column direction, the third conductive layer H.sub.j being opposite to the second conductive layers C.sub.1j to C.sub.mj ;
and
(D) wherein the laminate member A.sub.ij constitutes a nonlinear element U.sub.ij, and the first conductive layer C.sub.ij, a part of the conductive layer H.sub.j confronting the first conductive layer C.sub.ij, and a part of the ferroelectric liquid crystal between the first conductive layer C.sub.ij and the part of the second conductive layer H.sub.j constitute a ferroelectric liquid crystal element L.sub.ij.

4 more elements

A method for the manufacture of a liquid crystal display panel, comprising the steps of:

(A) preparing a first substrate member by the steps of:
(a) forming, on a transparent first substrate, a first layer member which has a first conductive layer formed on the first substrate and a second layer member formed on the first conductive layer, the second layer member having a second conductive layer formed on the first conductive layer, a third layer member formed on the second conductive layer and a third conductive layer formed on the third layer member, the third layer member having a non-single-crystal layer member or a first insulating layer which permits the passage therethrough of tunnel current;
(b) patterning the first layer member into a plurality m.times.n (m>1, n>1) of fourth layer members B.sub.11 to B.sub.1n, B.sub.21 to B.sub.2n, . . . B.sub.m1 to B.sub.mn sequentially arranged in a matrix form, the fourth layer member B.sub.ij (where i=1, 2 . . . m and j=1, 2, 3, . . . n) having a fourth conductive layer C.sub.ij formed by the first conductive layer on the first substrate and a fifth layer member D.sub.ij formed by the second layer member on the fourth conductive layer C.sub.ij ;
(c) depositing, on the first substrate, a photosensitive organic resin layer to cover the fourth laminate members B.sub.11 to B.sub.mn ;
(d) forming, by the photosensitive resin layer, a second insulating layer surrounding each of the fourth layer members B.sub.11 to B.sub.mn on the first substrate, the second insulating layer forming step including exposure of the photosensitive organic resin layer to light applied from the side of the first substrate and development of the exposed photosensitive organic resin layer;
(e) depositing, over the first substrate, a fifth conductive layer extending on the fourth layer members B.sub.11 to B.sub.mn and the first insulating layer;
(f) patterning the fifth conductive layer, the fourth layer members B.sub.11 to B.sub.1n, B.sub.21 to B.sub.2n, . . . B.sub.m1 to B.sub.mn and the second insulating layer into sixth layer members A.sub.11 to A.sub.1n, A.sub.21 to A.sub.2n, . . . . A.sub.m1 to A.sub.mn formed by the fourth layer member B.sub.11 to B.sub.1n, B.sub.21 to B.sub.2n, B.sub.31 to B.sub.3n, . . . B.sub.m1 to B.sub.mn on the fourth conductive layers C.sub.11 to C.sub.1n, C.sub.21 to C.sub.2n, . . . C.sub.m1 to C.sub.mn, respectively, third insulating layers K.sub.11 to K.sub.1(n-1), K.sub.21 to K.sub.2(n-1), . . . K.sub.m1 to K.sub.m(n-1) formed by the first insulating layer on the first substrate between the sixth layer members A.sub.11 and A.sub.12 to A.sub.1(n-1) and A.sub.1n, A.sub.21 and A.sub.22 to A.sub.2(n-1) and A.sub.2n, . . . A.sub.m1 and A.sub.m2 to A.sub.m(n-1) and A.sub.mn and sixth conductive layers F.sub.1, F.sub.2, . . . F.sub.m formed by the fifth conductive layer and extending on the sixth layer members A.sub.11 to A.sub.1n and the insulating layers K.sub.11 to K.sub.1(n-1), the sixth layer members A.sub.21 to A.sub.2n and the third insulating layers K.sub.21 to K.sub.2(n-1), . . . the sixth layer members A.sub.m1 to A.sub.m2 and the third insulating layers K.sub.m1 to K.sub.m(n-1), respectively;
(B) preparing a second substrate member by the steps of:
forming, on or over a second substrate having an insulating surface, a plurality n of seventh conductive layers H.sub.1, H.sub.2, . . . H.sub.n sequentially arranged in the row direction and extending in the column direction;
(C) turning the second substrate member upside down and deposing the first and second substrate members in opposing and substantially parallel relation to each other;
and
(D) filling ferroelectric liquid crystal in a space between the first and second substrate members.

9 more elements

A method for the manufacture of a liquid crystal display panel, comprising the steps of:

(A) preparing a first substrate member by the steps of:
(a) forming, on a first substrate, a first layer member which has a first conductive layer formed on the first substrate and a second layer member formed on the first conductive layer, the second layer member having a third layer member formed on the first conductive layer and a second conductive layer formed on the third layer member, the third layer member have a non-single-crystal layer member or a first insulating layer which permits the passage therethrough of tunnel current;
(b) patterning the first layer member into a plurality m of fourth laminate members B.sub.1, B.sub.2, . . . B.sub.m sequentially arranged in the column direction and extending in the row direction, the fourth layer member B.sub.i (where i=1, 2 . . . m) having a third conductive layer F.sub.i formed by the first conductive layer on the first substrate and a fifth layer member D.sub.i formed by the second layer member on the third conductive layer F.sub.i ;
(c) depositing, on the first substrate, a photosensitive organic resin layer to cover the fourth laminate members B.sub.1 to B.sub.m ;
(d) forming, by the photosensitive resin layer, a second insulating layer surrounding each of the layer members B.sub.1 to B.sub.m on the first substrate, the second insulating layer forming step including exposure of the photosensitive organic resin layer to light applied from the side of the first substrate and development of the exposed photosensitive organic resin layer;
(e) depositing, over the first substrate, a fourth conductive layer extending on the fourth layer members B.sub.1 to B.sub.m and the second insulating layer;
(f) patterning the fourth conductive layer, the fifth layer members D.sub.1 to D.sub.m and the second insulating layer into fifth conductive layer C.sub.11 to C.sub.1n, C.sub.21 to C.sub.2n, . . . C.sub.m1 to C.sub.mn formed by the fourth conductive layer, sixth layer members A.sub.11 to A.sub.1n, A.sub.21 to A.sub.2n, . . . A.sub.m1 to A.sub.mn formed by the fifth layer member D.sub.1 to D.sub.2, . . . D.sub.m on the third conductive layers F.sub.1, F.sub.2, . . . F.sub.m, respectively, third insulating layers K.sub.11 ' to K.sub.1n ', K.sub.21 ' to K.sub.2n ', . . . K.sub.m1 ' to K.sub.mn ' and fourth insulating layer K.sub.11 " to K.sub.1n ", K.sub.21 " to K.sub.2n ", . . . K.sub.m1 " to K.sub.mn " formed by the second insulating layer on the first substrate the third insulating layer K.sub.ij ' being formed under the fifth conductive layer C.sub.ij and making contact with the first surface of the third conductive layer F.sub.i and the first surface of the sixth layer member A.sub.ij, the fourth insulating layer K.sub.ij " being formed under the fifth conductive layer C.sub.ij and making contact with the second surface of the third conductive layer F.sub.i and the second surface of the sixth layer member A.sub.ij, the first and second surfaces of the third conductive layer F.sub.i defining its width, and the first and second surface of the sixth layer member A.sub.ij defining its width.
(B) preparing a second substrate member by the steps of:
forming, on or over a second substrate having an insulating surface, a plurality n of sixth conductive layers H.sub.1, H.sub.2, . . . H.sub.n sequentially arranged in the row direction and extending in the column direction;
(C) turning the second substrate member upside down and deposing the first and second substrate members in opposing and substantially parallel relation to each other;
and
(D) filling ferroelectric liquid crystal in a space between the first and second substrate members.

9 more elements

A method for the manufacture of a liquid crystal display panel, comprising the steps of:

(A) preparing a first substrate member by the steps of:
(a) forming, on a transparent first substrate, a first layer member which has a first conductive layer formed on the first substrate and a second layer member formed on the first conductive layer, the second layer member having a second conductive layer formed on the first conductive layer, a third layer member formed on the second conductive layer and a third conductive layer formed on the third layer member, the third layer member having a non-single-crystal layer member or a first insulating layer which permits the passage therethrough of tunnel current;
(b) patterning the first layer member into a plurality n (n>1) of fourth laminate members B.sub.1, B.sub.2, . . . B.sub.m sequentially arranged in the column direction and extending in the row direction, the fourth layer member B.sub.1 (where i=1, 2 . . . m) having a fourth conductive layer F.sub.i formed by the first conductive layer on the first substrate and a fifth layer member D.sub.i formed by the second layer member on the fourth conductive layer F.sub.1 ;
(c) depositing, on the first substrate, a photosensitive organic resin layer to cover the fourth laminate members B.sub.1 to B.sub.m ;
(d) forming, by the photosensitive resin layer, a second insulating layer surrounding each of the fourth layer members B.sub.1 to B.sub.m on the first substrate, the second insulating layer forming step including exposure of the photosensitive organic resin layer to light applied from the side of the first substrate and development of the exposed photosensitive organic resin layer;
(e) depositing, over the first substrate, a fifth conductive layer extending on the fourth layer members B.sub.1 to B.sub.m and the second insulating layer;
(f) patterning the conductive layer, the fifth layer members D.sub.1, D.sub.2, . . . D.sub.m and the second insulating layer into sixth conductive layer C.sub.11 to C.sub.1n, C.sub.21 to C.sub.2n, . . . C.sub.m1 to C.sub.mn formed by the fifth conductive layer, sixth layer members A.sub.11 to A.sub.1n, A.sub.21 to A.sub.2n, . . . A.sub.m1 to A.sub.mn formed by the fifth layer member D.sub.1, D.sub.2, . . . D.sub.m on the fourth conductive layers F.sub.1, F.sub.2, . . . F.sub.m, respectively, third insulating layers K.sub.11 ' to K.sub.1n ', K.sub.21 ' to K.sub.2n ', . . . K.sub.m1 ' to K.sub.mn ' and fourth insulating layer K.sub.11 " to K.sub.1n ", K.sub.21 " to K.sub.2n ", . . . K.sub.m1 " to K.sub.mn " formed by the second insulating layer on the first substrate the third insulating layer K.sub.ij ' being formed under the sixth conductive layer C.sub.ij and making contact with the first surface of the fourth conductive layer F.sub.i and the first surface of the sixth layer member A.sub.ij, the fourth insulating layer K.sub.ij " being formed under the sixth conductive layer C.sub.ij and making contact with the second surface of the fourth conductive layer F.sub.i and the second surface of the sixth layer member A.sub.ij, the first and second surfaces of the fourth conductive layer F.sub.i defining its width, and the first and second surface of the sixth layer member A.sub.ij defining its width.
(B) preparing a second substrate member by the steps of:
forming, on or over a second substrate have an insulating surface, a plurality n of sixth conductive layers H.sub.1, H.sub.2, . . . H.sub.n sequentially arranged in the row direction and extending in the column direction;
(C) turning the second substrate member upside down and deposing the first and second substrate members in opposing and substantially parallel relation to each other;
and
(D) filling ferroelectric liquid crystal in a space between the first and second substrate members.

9 more elements

Dependencies are inferred from the claim text.