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US 4,730,900 AGranted
Projection optical apparatus
AssigneeNippon Kogaku K. K.
InventorsMakoto Uehara, Hideo Mizutani, Kiyoyuki Muramatsu, Takeshi Asami, Akikazu Tanimoto
Life of this patent
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Abstract
A projection optical apparatus comprises illuminating means providing for an illuminating light beam, a projection optical system including optical elements disposed across the illuminating light beam and having an imaging plane, and detecting mean including temperature sensor means provided on at least one of the optical elements and producing an output corresponding to the temperature of the one optical element.
Claims19
An optical imaging apparatus for forming on a substrate an image of an object, comprising:
- means for holding said object,
- means for holding said substrate;
- means for supplying a light beam to illuminate said object;
- a projection optical system provided between said object and said substrate and having an optical axis and optical elements arranged on said optical axis, wherein said projection optical system receives light from the illuminated object and forms an image therefrom on the substrate, and wherein the optical performance of said projection optical system varies as a function of the manner in which the received light heats said projection optical system;
- means for detecting the temperature distribution of one of said optical elements in a direction radial to said optical axis;
- means for determining the variation of said optical performance of said projection optical system in response to the detected temperature distribution;
- and
- means for adjusting said image of said object on said substrate in accordance with the determined variation of said optical performance.
5 more elements
An optical imaging apparatus for forming on a substrate an image of an object, comprising:
- means for holding said object;
- means for holding said substrate;
- means for supplying a light beam to illuminate said object;
- a projection optical system provided between said object and said substrate and having an optical axis and optical elements arranged on said optical axis, wherein said projection optical system receives light from the illuminated object and forms an image therefrom on the substrate, and wherein the optical performance of said projection optical system varies as a function of the manner in which the received light heats said projection optical system;
- means for detecting the temperature distribution of one of said optical elements in a direction radial to said optical axis;
- and
- means for adjusting said image of said object on said substrate in response to the detected temperature distribution.
4 more elements
An optical imaging apparatus for forming on a substrate an image of an object, comprising:
- means for holding said object;
- means for holding said substrate;
- means for supplying a light beam to illuminate said object;
- a projection optical system provided between said object and said substrate and having an optical axis and optical elements arranged on said optical axis, wherein said projection optical system receives light from the illuminated object and forms an image therefrom on the substrate, and wherein the optical performance of said projection optical system varies as a function of the manner in which the received light heats said projection optical system;
- a plurality of thermometer elements provided on a surface of one of said optical elements at different distances from said optical axis and producing a plurality of corresponding outputs;
- and
- means for detecting the temperature distribution of said one optical element in a direction radial to said optical axis in response to said plurality of outputs of said thermometer elements to determine the variation of said optical performance of said projection optical system in response to the detected temperature distribution.
4 more elements
An optical imaging apparatus for forming on a substrate an image of an object, comprising:
- means for holding said object;
- means for holding said substrate;
- means for supplying a light beam to illuminate said object;
- a projection optical system provided between said object and said substrate and having an optical axis and lens elements arranged on said optical axis, said lens elements including a first lens elements and a second lens element having a surface contacting a surface of said first lens element, wherein said projection optical system receives light from the illuminated object and forms an image therefrom on the substrate, and wherein the optical performance of said projection optical system varies as a function of the manner in which the received light heats said projection optical system;
- a plurality of thermometer elements provided between said surface of said first lens element and said surface of said second lens elements at different distances from said optical axis and producing a plurality of corresponding outputs;
- means for detecting the temperature distribution of said first and second lens elements in a direction radial to said optical axis to determine the variation of said optical performance of said projection optical system in response to the detected temperature distribution;
- and
- means for adjusting said image of said object on said substrate in accordance with the determined variation of said optical performance.
5 more elements
An optical imaging apparatus for forming on a substrate an image of an object, comprising:
- means for holding said object;
- means for holding said substrate;
- means for supplying a light beam to illuminate said object;
- a projection optical system provided between said object and said substrate and having an optical axis and optical elements arranged on said optical axis, wherein said projection optical system receives light from the illuminated object and forms an image therefrom on the substrate, and wherein the optical performance of said projection optical system varies as a function of the manner in which the received light heats said projection optical system;
- a plurality of thermometer elements provided on a surface of one of said optical elements at different distances from said optical axis and producing a plurality of corresponding outputs;
- and
- means for determining the variation of said optical performance of said projection optical system in response to said plurality of outputs of said thermometer elements.
4 more elements
An optical imaging apparatus for forming on a substrate an image of an object, comprising:
- means for holding said object;
- means for holding said substrate;
- means for supplying a light beam to illuminate said object;
- a projection optical system provided between said object and said substrate and having an optical axis and optical elements arranged on said optical axis, wherein said projection optical system receives light from the illuminated object and forms an image therefrom on the substrate, and wherein the optical performance of said projection optical system varies as a function of the manner in which the received light heats said projection optical system;
- a plurality of thermometer elements provided near an aperture stop of said projection optical system at different distances from said optical axis and producing a plurality of corresponding outputs;
- and
- means for adjusting said image of said object on said substrate in response to said plurality of outputs of said thermometer elements.
4 more elements
Dependencies are inferred from the claim text.