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US 4,730,334 AGranted
Ultraviolet metal ion laser
OwnerGeorge J. Collins, John R. McNeil +1inventors
InventorsGeorge J. Collins, John R. McNeil, Zeng-qi Yu
Life of this patent
Estimating the term…
Abstract
A gas ion laser employs a direct current electron beam to create a rare gas ion density and a cylindrical magnetron to sputter a partial pressure of metal vapor density and to also create a rare gas ion density. Thermal energy charge transfer selectively pumps the upper metal ion laser transitions on a continuous wave basis.
Claims50
A metal ion laser comprising:
- a cylindrical vacuum enclosure having a longitudinal axis that is coincident with an unobstructed longitudinal optical axis defined by a resonant optical cavity comprising two mirrors, one at each end thereof, one or both of which mirrors are employed to extract power from the laser;
- a cylindrical magnetron sputtering source positioned coaxially with an adjacent to said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source including a cylindrical metal cathode tube positioned coaxially with and enclosed within said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source further including magnetic means positioned outside said cylindrical vacuum enclosure for providing a longitudinal magnetic field parallel to the longitudinal optical axis and within said cylindrical metal cathode tube and for additionally providing fringe magnetic fields at the ends of said cylindrical metal cathode tube, the cylindrical magnetron sputtering source further including two cylindrical anodes each having a diameter substantially equal to the diameter of said cylindrical vacuum enclosure, one of the cylindrical anodes being positioned coaxially with the cylindrical vacuum enclosure at one end thereof, and the other one of the cylindrical anodes being positioned coaxially with the cylindrical vacuum enclosure at the other end thereof;
- two annular shaped cold cathodes each having diameter substantially equal to the diameter of the cylindrical vacuum enclosure and the two cylindrical anodes, each of said annular shaped cold cathodes having a central aperture therein and having a concave inner surface, said two annular shaped cold cathodes being positioned coaxially with and outside of the two cylindrical anodes such that the concave inner surface of one of the annular shaped cold cathodes faces the concave inner surface of the other annular shaped cold cathode and such that the aperture in each of the annular shaped cold cathodes is in substantial alignment with said longitudinal optical axis, said two annular shaped cold cathodes being operative for emitting counter propagating electron beams focused into said cylindrical metal cathode tube by said concave inner surface of each of said annular shaped cold cathodes and by said fringe magnetic fields and being confined within said cylindrical metal cathode tube by said longitudinal magnetic field;
- and
- power supply means electrically connected to said metal ion laser for causing the cylindrical magnetron sputtering source to sputter metal vapor from the cylindrical metal cathode tube and for creating rare gas ions.
2 more elements
A metal ion laser comprising:
- a cylindrical vacuum enclosure having a longitudinal axis that is coincident with an unobstructed longitudinal optical axis defined by a resonant optical cavity comprising two mirrors, one at each end thereof, one or both of which mirrors are employed to extract power from the laser;
- a cylindrical magnetron sputtering source positioned coaxially with and adjacent to said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source including a cylindrical metal cathode tube positioned coaxially with and forming at least a portion of said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source further including magnetic means positioned outside said cylindrical vacuum enclosure for providing a longitudinal magnetic field parallel to the longitudinal optical axis and within said cylindrical metal cathode tube and for additionally providing fringe magnetic fields at the ends of said cylindrical metal cathode tube, the magnetic means and said cylindrical vacuum enclosure forming an annular cavity through which a coolant is circulated, the cylindrical magnetron sputtering source further including two cylindrical anodes each having a diameter substantially equal to the diameter of said cylindrical vacuum enclosure, one of the cylindrical anodes being positioned coaxially with the cylindrical vacuum enclosure at one end thereof, and the other one of the cylindrical anodes being positioned coaxially with the cylindrical vacuum enclosure at the other end thereof;
- two annular shaped cold cathodes each having a diameter substantially equal to the diameter of the cylindrical vacuum enclosure and the two cylindrical anodes, each of said annular shaped cold cathodes having a central aperture therein and having a concave inner surface, said two annular shaped cold cathodes being positioned coaxially with and outside of the two cylindrical anodes such that the concave inner surface of one of the annular shaped cold cathodes faces the concave inner surface of the other annular shaped cold cathode and such that the aperture in each of the annular shaped cold cathodes is in substantial alignment with said longitudinal optical axis, said two annular shaped cold cathodes being operative for emitting counter propagating electron beams focused into said cylindrical metal cathode tube by said concave inner surface of each of said annular shaped cold cathodes and by said fringe magnetic fields and being confined within said cylindrical metal cathode tube by said longitudinal magnetic field;
- and
- power supply means electrically connected to said metal ion laser for causing the cylindrical magnetron sputtering source to sputter metal vapor from the cylindrical metal cathode tube and for creating rare gas ions.
2 more elements
A metal ion laser comprising:
- a cylindrical vacuum enclosure having a longitudinal axis that is coincident with an unobstructed longitudinal optical axis defined by a resonant optical cavity comprising two mirrors, one at each end thereof, one or both of which mirrors are employed to extract power from the laser;
- a cylindrical magnetron sputtering source positioned coaxially with and adjacent to said cylindrical vacuum enclosure the cylindrical magnetron sputtering source including a cylindrical metal cathode tube positioned coaxially with and forming at least a portion of said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source further including magnetic means positioned outside said cylindrical vacuum enclosure for providing a longitudinal magnetic field parallel to the longitudinal optical axis and within said cylindrical metal cathode tube and for additionally providing fringe magnetic fields at the ends of said cylindrical metal cathode tube, the magnetic means and said cylindrical vacuum enclosure forming a cavity through which a coolant is circulated, the cylindrical magnetron sputtering source further including a cylindrical mesh anode having a length approximately equal to that of said cylindrical metal cathode tube and positioned coaxially with and inside said cylindrical metal cathode tube;
- two annular shaped cold cathodes each having a diameter substantially equal to the diameter of the cylindrical vacuum enclosure, each of said annular shaped cold cathodes having a central aperture therein and having a concave inner surface, said two annular shaped cold cathodes being positioned coaxially with and at opposite ends of said cylindrical vacuum enclosure such that the concave inner surface of one of the annular shaped cold cathodes faces the concave inner surface of the other annular shaped cold cathode and such that the aperture in each of the annular shaped cold cathodes is in substantial alignment with said longitudinal optical axis, said two annular shaped cold cathodes being operative for emitting counter propagating electron beams focused into said cylindrical metal cathode tube by said concave inner surface of each of said annular shaped cold cathodes and by said fringe magnetic fields and being confined within said cylindrical metal cathode tube by said longitudinal magnetic field;
- and
- power supply means electrically connected to said metal ion laser for causing the cylindrical magnetron sputtering source to sputter metal vapor from the cylindrical metal cathode tube and for creating rare gas ions.
2 more elements
A metal ion laser comprising:
- a cylindrical vacuum enclosure having a longitudinal axis that is coincident with an unobstructed longitudinal optical axis defined by a resonant optical cavity comprising two mirrors, one at each end thereof, one or both of which mirrors are employed to extract power from the laser;
- a cylindrical magnetron sputtering source positioned coaxially with and adjacent to said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source including a cylindrical metal cathode tube positioned coaxially with and forming at least a portion of said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source further including magnetic means positioned outside said cylindrical vacuum enclosure for providing a longitudinal magnetic field parallel to the longitudinal optical axis and within said cylindrical metal cathode tube and for additionally providing fringe magnetic fields at the ends of said cylindrical metal cathode tube, the magnetic means and said cylindrical vacuum enclosure forming a cavity through which a coolant is circulated, the cylindrical magnetron sputtering source further including a pair of pin anodes, one of which is positioned proximate to one end of said cylindrical metal cathode tube and the other of which is positioned proximate to the other end of said cylindrical metal cathode tube;
- two annular shaped cold cathodes each having a diameter substantially equal to the diameter of the cylindrical vacuum enclosure, each of said annular shaped cold cathodes having a central aperture therein and having a concave inner surface, said two annular shaped cold cathodes being positioned coaxially with and at opposite ends of said cylindrical vacuum enclosure such that the concave inner surface of one of the annular shaped cold cathodes faces the concave inner surface of the other annular shaped cold cathode and such that the aperture in each of the annular shaped cold cathodes is in substantial alignment with said longitudinal optical axis, said two annular shaped cold cathodes being operative for emitting counter propagating electron beams focused into said cylindrical metal cathode tube by said concave inner surface of each of said annular shaped cold cathodes and by said fringe magnetic fields and being confined within said cylindrical metal cathode tube by said longitudinal magnetic field;
- and
- power supply means electrically connected to said metal ion laser for causing the cylindrical magnetron sputtering source to sputter metal vapor from the cylindrical metal cathode tube and for creating rare gas ions.
2 more elements
A metal ion laser comprising:
- a cylindrical vacuum enclosure having a longitudinal axis that is coincident with an unobstructed longitudinal optical axis defined by a resonant optical cavity comprising two mirrors, one at each end thereof, one or both of which mirrors are employed to extract power from the laser;
- a cylindrical magnetron sputtering source positioned coaxially with and adjacent to said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source including a cylindrical metal cathode tube positioned coaxially with and forming at least a portion of said cylindrical vacuum enclosure, the cylindrical magnetron sputtering sourc further including magnetic means positioned outside said cylindrical vacuum enclosure for providing a longitudinal magnetic field parallel to the longitudinal optical axis and within said cylindrical metal cathode tube and for additionally providing fringe magnetic fields at the ends of said cylindrical metal cathode tube, the magnetic means and said cylindrical vacuum enclosure forming a cavity through which a coolant is circulated, the cylindrical magnetron sputtering source further including anode means positioned proximate each end of said cylindrical metal cathode tube;
- two annular electron sources each having a diameter substantially equal to the diameter of the cylindrical metal cathode tube, each of said annular electron sources having a pair of concave grids forming an inner surface thereof and having a central aperture therein, said two annular electron sources being positioned coaxially with and proximate opposite ends of said cylindrical metal cathode tube such that the inner surface of one of the annular electron sources faces the inner surface of the other one of the annular electron sources and such that the aperture in each of the annular electron sources is in substantial alignment with said longitudinal optical axis, said two annular electron sources being operative for emitting counter propagating electron beams focused into said cylindrical metal cathode tube by said inner surface of each of said annular electron sources and said fringe magnetic fields and being confined within said cylindrical metal cathode tube by said longitudinal magnetic field;
- and
- power supply means electrically connected to said metal ion laser for causing the cylindrical magnetron sputtering source to sputter metal vapor from the cylindrical metal cathode tube and for creating rare gas ions.
2 more elements
A metal ion laser comprising:
- a cylindrical vacuum enclosure having a longitudinal axis that is coincident with an unobstructed longitudinal optical axis defined by a resonant optical cavity comprising two mirrors, one at each end thereof, one or both of which mirrors are employed to extract power from the laser;
- a cylindrical magnetron sputtering source positioned coaxially with and adjacent to said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source including cylindrical metal cathode tube positioned coaxially with and enclosed within said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source further including magnetic means positioned outside said cylindrical vacuum enclosure for providing a longitudinal magnetic field parallel to the longitudinal optical axis and within said cylindrical metal cathode tube and for additionally providing fringe magnetic fields at the ends of said cylindrical metal cathode tube, the cylindrical magnetron sputtering source further including a cylindrical mesh anode having a length approximately equal to that of said cylindrical metal cathode tube and positioned coaxially with and inside said cylindrical metal cathode tube;
- two annular shaped cold cathodes each having a diameter substantially equal to the diameter of the cylindrical vacuum enclosure, each of said annular shaped cold cathodes having a central aperture therein and having a concave inner surface, said two annular shaped cold cathodes being positioned coaxially with and at opposite ends of said cylindrical vacuum enclosure such that the concave inner surface of one of the annular shaped cold cathodes faces the concave inner surface of the other annular shaped cold cathode and such that the aperture in each of the annular shaped cold cathodes is in substantial alignment with said longitudinal optical axis, said two annular shaped cold cathodes being operative for emitting counter propagating electron beams focused into said cylindrical metal cathode tube by said concave inner surface of each of said annular shaped cold cathodes and by said fringe magnetic fields and being confined within said cylindrical metal cathode tube by said longitudinal magnetic field;
- and
- power supply means electrically connected to said metal ion laser for causing the cylindrical magnetron sputtering source to sputter metal vapor from the cylindrical metal cathode tube and for creating rare gas ions.
2 more elements
A metal ion laser comprising:
- a cylindrical vacuum enclosure having a longitudinal axis that is coincident with an unobstructed longitudinal optical axis defined by a resonant optical cavity comprising two mirrors, one at each end thereof, one or both of which mirrors are employed to extract power from the laser;
- a cylindrical magnetron sputtering source positioned coaxially with and adjacent to said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source including a cylindrical metal cathode tube positioned coaxially with and enclosed within said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source further including magnetic means positioned outside said cylindrical vacuum enclosure for providing a longitudinal magnetic field parallel to the longitudinal optical axis and within said cylindrical metal cathode tube and for additionally providing fringe magnetic fields at the ends of said cylindrical metal cathode tube, the cylindrical magnetron sputtering source further including a pair of pin anodes, one of which is positioned proximate to one end of said cylindrical metal cathode tube and the other of which is positioned proximate to the other end of said cylindrical metal cathode tube;
- two annular shaped cold cathodes each having a diameter substantially equal to the diameter of the cylindrical vacuum enclosure, each of said annular shaped cold cathodes having a central aperture therein and having a concave inner surface, said two annular shaped cold cathodes being positioned coaxially with and at opposite ends of said cylindrical vacuum enclosure such that the concave inner surface of one of the annular shaped cold cathodes faces the concave inner surface of the other annular shaped cold cathode and such that the aperture in each of the annular shaped cold cathodes is in substantial alignment with said longitudinal optical axis, said two annular shaped cold cathodes being operative for emitting counter propagating electron beams focused into said cylindrical metal cathode tube by said concave inner surface of each of said annular shaped cold cathodes and by said fringe magnetic fields and being confined within said cylindrical metal cathode tube by said longitudinal magnetic field;
- and
- power supply means electrically connected to said metal ion laser for causing the cylindrical magnetron sputtering source to sputter metal vapor from the cylindrical metal cathode tube and for creating rare gas ions.
2 more elements
A metal ion laser comprising:
- a cylindrical vacuum enclosure having a longitudinal axis that is coincident with an unobstructed longitudinal optical axis defined by a resonant optical cavity comprising two mirrors, one at each end thereof, one or both of which mirrors are employed to extract power from the laser;
- a cylindrical magnetron sputtering source positioned coaxially with and adjacent to said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source including a cylindrical metal cathode tube positioned coaxially with and enclosed within said cylindrical vacuum enclosure, the cylindrical magnetron sputtering source further including magnetic means positioned outside said cylindrical vacuum enclosure for providing a longitudinal magnetic field parallel to the longitudinal optical axis and within said cylindrical metal cathode tube and for additionally providing fringe magnetic fields at the ends of said cylindrical metal cathode tube, the cylindrical magnetron sputtering source further including anode means positioned proximate each end of said cylindrical vacuum enclosure;
- two annular electron sources each having a diameter substantially equal to the diameter of the cylindrical vacuum enclosure, each of said annular electron sources having a pair of concave grids forming an inner surface thereof and having a central aperture therein, said two annular electron sources being positioned coaxially with and proximate opposite ends of said cylindrical metal cathode tube such that the inner surface of one of the annular electron sources faces the inner surface of the other one of the annular electron sources and such that the aperture in each of the annular electron sources is in substantial alignment with said longitudinal optical axis, said two annular electron sources being operative for emitting counter propagating electron beams focused into said cylindrical metal cathode tube by said inner surface of each of said annular electron sources and said fringe magnetic fields and being confined within said cylindrical metal cathode tube by said longitudinal magnetic field;
- and
- power supply means electrically connected to said metal ion laser for causing the cylindrical magnetron sputtering source to sputter metal vapor from the cylindrical metal cathode tube and for creating rare gas ions.
2 more elements
Dependencies are inferred from the claim text.