Gas laser with high-frequency excitation
AssigneeElcede GmbH
InventorDieter Butenuth
Life of this patent
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Abstract
The laser tube (14) of a gas laser is arranged in an electrically grounded metallic housing (11) which forms the one electrode of a capacitor. The second electrode (41) of the capacitor is arranged, together with a helically wound wire (53) for the formation of an inductance, in the annular space between the laser tube and the housing. The capacitance and the inductance form an LC-circuit for adapting the impedance of the laser to that of a high-frequency generator. To adjust capacitance, the distance between the two capacitor electrodes (11 and 41) can be adjusted via a first setting device (43 to 45) and the length of the coil formed by the helical wire (53) can be adjusted to set the inductance via a second setting device (56 to 58).
Claims22
A gas laser comprising an elongate laser tube with first and second electrode means for high-frequency excitation thereof, an elongate conductive tubular housing with an inner wall and a longitudinal axis and end closures supporting the ends of said laser tube in radially spaced relation to said inner wall within said tubular housing, gas-flow supply means for supplying gas to said laser tube, said gas supply means including an inlet connection at one end and an outlet connection at the other end of said laser tube, a grounding connection for a first one of said electrode means to said housing, and means including a high-frequency lead-through connection via said housing for excitation of said second electrode means, said lead-through connection comprising a movable capacitor-electrode element and an electrically insulating means for radially supporting and adjusting said movable capacitor-electrode element within said housing for offset with respect to said inner wall of said housing, whereby the housing comprises another capacitor element.
A gas laser comprising an elongate laser tube with first and second electrode means for high-frequency excitation thereof, an elongate conductive tubular housing with an inner wall and a longitudinal axis and closures supporting the ends of said laser tube in radially spaced relation to said inner wall within said tubular housing, gas-flow supply means for supplying gas to said laser tube, said gas supply means including an inlet connection at one end and an outlet connection at the other end of said laser tube, a grounding connection for a first one of said electrode means to said housing, and means including a high-frequency lead-through connection via said housing for excitation of the other of said electrode means, in which said lead-through connection comprises a variable-inductance helical-wire coil and an electrically insulating means for radially supporting said helical-wire coil within said housing and in radially spaced relation to both said housing and said laser tube, and electrically insulating adjustment means within said housing for varying inductance by selective adjustment of elongation of the helical coil.
Dependencies are inferred from the claim text.