Programmable thermal emulator test die
AssigneeUnited Technologies Corporation
InventorsMichael D. Cusack, Christopher A. Freymuth
Life of this patent
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Abstract
A novel test die for emulating the thermal characteristics of functional product dies includes a plurality of concentric emulator ring configurations fabricated about the die center, each having a plurality of heating resistors approximately forming a rectangle, a plurality of sense diodes located in proximity to the heating resistors and a plurality of hot spot resistors located in proximity to both the heating resistors and the sense diodes. Metallic interconnections are formed on the die which selectively provide each of the heating resistors and hot spot resistors with excitation signals and present signals from the sense diodes indicative of the voltage thereacross.
Claims9
A programmable die for simulating the thermal characteristics of a given product die, comprising:
- a die having a plurality of bond pads arrayed along the perimeter thereof;
- a plurality of heating resistor groups, each group including one or more linear resistive elements, said plurality of resistor groups being disposed in a lesser plurality of generally concentric rings on a major surface of said die;
- a plurality of sense diodes formed in said die surface at a plurality of locations in proximity to said heating resistor groups;
- a plurality of hot spot resistors formed in said die surface at another plurality of locations in proximity to said heating resistor groups and said sense diodes;
- and
- interconnection array, having a plurality of electrical signal conductors disposed on said die major surface, each connected between a related one of said bond pads and, alternately, to one of said heating resistor groups, said sense diodes, and said hot spot resistors, whereby said array conducts electrical signals applied to said bond pads to individual ones of said heating resistor groups, said sense diodes, and said hot spot resistors, whereby said heating resistors and said hot spot resistors provide, when excited, an actual surface temperature value for said die, and wherein said sense diodes each provide a signal indicative of said actual surface temperature.
Dependencies are inferred from the claim text.