Method for producing glow polymerisate layers
AssigneeSiemens Aktiengesellschaft
InventorsWolfgang Kleeberg, Johann Kammermaier, Gerhard Rittmayer, Rolf-Winfried Schulte
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Abstract
Glow polymerisate layers can be generated on a substrate, starting from hydrocarbons and/or fluorocarbons, by means of a high-frequency, low-pressure glow discharge. Glow polymerisates completely saturated with hydrogen or fluorine are obtained when the glow discharge is carried out in the microwave range between 0.5 and 1.000 GHz and if the amplitude E.sub.0 of the effective field strength in the vicinity of the substrate no greater than 850 V/cm.
Claims6
A process for the formation of polymer layers on a substrate comprising glow discharging fluorocarbon monomers at a high frequency and a low pressure wherein said glow discharging is conducted by means of a hollow wave conductor and in the absence of a carrier gas in the microwave range of between 0.5 and 1,000 GHz and wherein the substrate is disposed outside of the hollow wave conductor and wherein the amplitude E.sub.0 of the effective field strength in the vicinity of said substrate is no greater than 850 V/cm.
Dependencies are inferred from the claim text.