Measuring head for vacuum gauge
AssigneeLeybold-Heraeus GmbH
InventorsRudolf Flosbach, Gunter Reich, Hans-Joachim Schubert
Life of this patent
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Abstract
A measuring head for a vacuum gauge. An essentially cylindrical housing encloses a measuring cell which is sealed in a vacuum tight manner against the surrounding atmosphere and is connectable with an evacuatable cavity. A measuring filament for producing an electrical signal corresponding to the pressure in the measuring cell is disposed in the measuring cell. The measuring filament is disposed approximately perpendicularly to the axial direction of the housing.
Claims22
Measuring head for a vacuum gauge, comprising:
- as essentially cylindrical housing;
- and
- a measuring cell disposed in said housing and including seal means for sealing said measuring cell in a vacuum tight manner against a surrounding atmosphere, coupling means for coupling said measuring cell with an evacuatable cavity, and a measuring filament disposed in said measuring cell for producing an electrical signal corresponding to a pressure in the measuring cell, said measuring filament being oriented approximately perpendicularly to the axial direction of said housing, wherein said coupling means comprises an opening in said measuring cell and a gas permeable cover covering said opening.
Measuring head for a vacuum gauge, comprising:
- an essentially cylindrical housing;
- and
- a measuring cell disposed in said housing and including seal means for sealing said measuring cell in a vacuum tight manner against a surrounding atmosphere, coupling means for coupling said measuring cell with an evacuatable cavity, and a measuring filament disposed in said measuring cell for producing an electrical signal corresponding to a pressure in the measuring cell, said measuring filament being oriented approximately perpendicularly to the axial direction of said housing, wherein said seal means includes a partition separating said measuring cell from the surrounding atmosphere and further including bushings projecting through said partition, said bushings each including one of a current conducting plug-in pin or socket on its side adjacent the surrounding atmosphere.
Measuring head for a vacuum gauge, comprising:
- an essentially cylindrical housing;
- and
- a measuring cell disposed in said housing and including seal means for sealing said measuring cell in a vacuum tight manner against a surrounding atmosphere, coupling means for coupling said measuring cell with an evacuatable cavity, and a measuring filament disposed in said measuring cell for producing an electrical signal corresponding to a pressure in the measuring cell, said measuring filament being oriented approximately perpendicularly to the axial direction of said housing, wherein two measuring filaments are disposed within said measuring cell, and further including a plurality of bushings communicating with said measuring cell and a plurality of electrical terminals electrically connected with said filaments, each said terminal being brought out of said measuring cell through a respective one of said bushings.
Dependencies are inferred from the claim text.