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US 4,727,653 AGranted
Coordinate measuring instrument
AssigneeMitutoyo Mfg. Co., Ltd.
InventorsMatusiro Fujitani, Hideo Takaku, Yukiji Yoda
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AssigneeMitutoyo Mfg. Co., Ltd.
InventorsMatusiro Fujitani, Hideo Takaku, Yukiji Yoda
Estimating the term…
A coordinate measuring instrument, wherein a measuring element support member (1) having a measuring element (2) is movably supported on a mount plate (3), this measuring element (2) is abutted against the surface and the like of a work to be measured, which is mounted on the mount plate (3), and relative movement values between this measuring element (2) and the work are detected to measure a configuration and the like of the work. In this measuring instrument, vertical surfaces (3A, 3B, 50A and 50B) are formed on the mount plate (30) and air bearings (47, 52 and 53) opposed to these vertical surfaces are provided on legs (8 and 9) of the measuring element support member (1), so that the measuring element support member (1) can be regulated in its position in a direction of X-axis.
A coordinate measuring instrument, wherein a work to be measured, which is mounted on a mount plate, and a measuring element held by a moving mechanism having a pair of legs are moved relative to each other at least in two directions of axes perpendicularly intersecting each other out of the directions of X-, Y- and Z-axes, and configuration and the like are measured from relative displacement values, characterized in that:
Dependencies are inferred from the claim text.