Apparatus for measuring the angular distribution of charged particles scattered by a sample surface
AssigneeLeybold-Heraeus GmbH
InventorMartin Henzler
Life of this patent
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Abstract
Apparatus for measuring the angular distribution of charged particles scattered by a sample surface, having a source for the production of a primary particle beam and a deflection system for the deflection of the scattered particles onto the entry orifice of a detector connected to the deflection system, useful, for example, for the study of crystal surfaces by the so-called LEED technique. On the side of the deflection system opposite the sample not only a detector but also a particle source is disposed such that the primary beam also passes through the deflection system. The scannable range of the apparatus for determining the angular distribution of scattered electrons resulting from diffraction is considerably greater than that of the prior art.
Claims6
Apparatus for the measurement of the angular distribution of low energy electrons scattered at a sample surface, wherein the scattered electrons have the same energy as the electrons of a primary beam comprising electron source means for the production of a primary low energy electron beam and electrostatic deflection means for deflecting both said primary beam and said scattered electrons for enabling measurement of the angular distribution of said scattered electrons;
- wherein said deflection means deflects said scattered electrons leaving the sample at a preselected exit angle onto an entrance orifice of a detector responsive to the deflection means;
- and further comprising on the side of said deflection means opposite the sample not only said detector but also said electron source means disposed side by side such that the primary electron beam also passes through said deflection means, and wherein said electrostatic deflection means is divided in its longitudinal direction into two sections and each section comprises rotationally symmetrically disposed electrostatic deflection plates.
Dependencies are inferred from the claim text.