Method of producing sheets of crystalline material
AssigneeMassachusetts Institute of Technology
InventorsCarl O. Bozler, John C. C. Fan, Robert W. McClelland
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Abstract
A method of producing sheets of crystalline material is disclosed, as well as devices employing such sheets. In the method, a growth mask is formed upon a substrate and crystalline material is grown at areas of the substrate exposed through the mask and laterally over the surface of the mask to form a sheet of crystalline material. This sheet is separated, and the substrate can optionally be reused. The method has particular importance in forming sheets of crystalline semiconductor material for use in solid state devices.
Claims13
A method for producing sheets of essentially single crystal material of device quality, comprising:
- a. forming a crystal growth mask on a crystallization substrate;
- b. depositing crystalline material at exposed areas of said substrate under conditions suitable to provide lateral growth of crystalline material over said mask;
- c. continuing lateral overgrowth until a sheet of essentially single crystal material having desired dimensions has formed;
- d. bonding a new substrate to the sheet of essentially single crystal material;
- e. separating said new substrate and sheet of essentially single crystal material from the crystallization substrate;
- and,
- f. optionally reusing the crystallization substrate to produce additional sheets of essentially single crystal material.
A method of producing multiple sheets of essentially single crystal gallium arsenide of device quality from an essentially single crystal arsenide substrate, comprising:
- a. forming a crystal growth mask providing an unmasked area on said gallium arsenide substrate which comprises a plurality of parallel slits;
- b. epitaxially depositing gallium arsenide at exposed areas of said substrate employing a chloride deposition process under conditions to provide lateral growth of gallium arsenide material over said mask;
- c. continuing lateral overgrowth of said gallium arsenide material under conditions suitable to form a sheet of essentially single crystal gallium arsenide having the desired dimensions;
- d. bonding a second substrate to the sheet of essentially single crystal gallium arsenide material;
- e. separating the second substrate and sheet of essentially single crystal gallium arsenide material from the gallium arsenide substrate;
- and
- f. reusing the gallium arsenide crystallization substrate to produce additional sheets of essentially single crystal gallium arsenide by repeating steps a-e.
Dependencies are inferred from the claim text.