Apparatus and method for the pretreatment of biological specimens for use in scanning electron microscopes
AssigneeHitachi Koki Co., Ltd.
InventorKintaro Mori
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Abstract
A method for pretreating a biological material for observation by scanning electron microscope which comprises: placing a biological material in a vacuum, supplying an inert gas to a predetermined level of pressure; and energizing the inert gas for ionization for a time sufficient to cause the surface of the biological material to be activated whereby when an electron beam is irradiated on the treated surfaces, secondary electrons are emitted in a high efficiency. The apparatus for carrying out the above method is also described.
Claims3
A method for pretreating a biological material in a vacuum chamber for subsequent observation through a scanning electron microscope, the method comprising supplying only an inert gas to a vacuum chamber to provide a pressure within the vacuum chamber of from 0.3 to 5 Torr., energizing said inert gas by application of a high frequency output power of from 5 to 20 W for a period of from 5 to 10 minutes to generate inert gas ions and irradiating the surfaces of a biological material with said inert gas ions, whereby if the treated surfaces are subsequently irradiated with an electron beam for microscopic observation, secondary electrons are emitted from the treated surfaces.
Dependencies are inferred from the claim text.