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US 4,726,685 AGranted
Optical measuring device for detecting surface characteristics of object
AssigneeOlympus Optical Co., Ltd.
InventorsShohei Kobayashi, Kenichi Ito
Life of this patent
Estimating the term…
Abstract
In an optical measuring device including a laser ray source, a polarization prism, an objective lens to condensing parallel ray to the surface of a substance to be measured, and divided photo-sensor means to detect reflected ray, the divided photo-sensor means is two divided photo-sensors, to eliminate noise effect caused by the laser ray source.
Claims14
An optical measuring device comprising:
- a laser ray source for emitting a laser ray, an objective lens for condensing the ray from said laser ray source as an incident ray on a surface of a substance to be measured, a polarization element for passing the ray from the laser ray source to the objective lens and for guiding a reflected ray which is reflected from the surface of the substance and through the objective lens to a direction other than said ray source, a ray dividing element for dividing the reflected ray from the polarization element into two identical divided rays which are transmitted in two directions along two optical axes, two prisms each receiving one of the divided rays and each having a reflecting surface forming substantially the critical angle relative to each optical axis of the reflected ray, and two divided photo detecting elements each operative to detect the ray quantity change of the reflected ray reflected from its corresponding prism, the two divided photo detecting elements having a pair of divided light-receiving surfaces 33A and 33B and a pair of divided light-receiving surfaces 34A and 34B, respectively, for receiving thereon the reflected rays to produce outputs I.sub.33 A, I.sub.33 B, I.sub.34 A and I.sub.34 B corresponding to the ray quantities of the reflected rays received by the light-receiving surfaces 33A, 33B, 34A and 34B, respectively, so that the surface of the substance to be measured is detected on the basis of a difference between the sum of I.sub.33 B and I.sub.34 A and the sum of I.sub.33 A and I.sub.34 B.
An optical measuring device for optically measuring a surface characteristic of an object comprising:
- light projecting means for projecting a light beam along an optical axis onto an object to be measured;
- beam splitting means disposed along the optical axis of the reflected light beam which is reflected from the object for splitting the reflected light beam into two identical split light beams;
- two reflecting means disposed along the paths of the respective identical split light beams for reflecting the two identical split light beams to produce two complementary light beams correlated with each other to compensate for fluctuation of the light beam;
- and two photodetecting means each disposed to receive one of the complementary light beans for detecting the amount of light impinging thereon and producing corresponding output detection signals which can be combined to produce an output signal representative of the surface characteristic to be optically measured and which is essentially free of the fluctuation of the light beam.
1 more element
Dependencies are inferred from the claim text.