Accelerometer proof mass interface

Abstract

An accelerometer with improved resistance to errors due to thermal stress. The accelerometer comprises a proof mass assembly (44), a stator (40), and an interface member (90) that includes a plate-like body positioned between the proof mass assembly and the stator. The proof mass assembly includes a reed (72) suspended from a support (70), and a reed capacitor plate positioned on the reed. The body includes a body capacitor plate (94) positioned to form a capacitor with the reed capacitor plate. The interface member includes first mounting member (110) for securely mounting a first area of the stator with respect to a corresponding first area of the support, and a mounting element (126) extending between a second area of the stator and a corresponding second area of the support. The mounting element is relatively compliant along a first axis, and relatively rigid along all other axes. The first axis lies in the plane of the body and passes approximately through the first mounting member.

Dependencies are inferred from the claim text.