Method for forming a hard carbon thin film on article and applications thereof

A method of forming a carbon layer and an intermediate layer on the surface of an article comprising the steps of:

• respectively disposing the article, a solid carbon source and an intermediate layer material solid source in a vacuum chamber which contains intermediate layer material gas of a predetermined pressure;
• vaporizing the intermediate layer material solid source and applying an electrical field to the vaporized intermediate layer material solid source to ionize it as plasma which decomposes the intermediate layer material gas, whereby an intermediate layer material compound is produced in the plasma;
• applying an electrical potential to the article so that the intermediate layer material compound is deposited onto the surface of the article as the intermediate layer;
• exhausting the hydrocarbon gas and introducing catalystic gas in the chamber wherein said catalystic gas is hydrogen gas or mixture gas of hydrogen and argon, and vaporizing the solid carbon and applying an electric field to the vaporized carbon to ionize the vaporized carbon;
• and
• applying an electrical potential to the article so that the ionized vapor carbon is deposited onto the intermediate thin layer on the article as the hard carbon layer.