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US 4,724,106 AGranted
Process for forming organic film
AssigneeFutaba Denshi Kogyo K.K.
InventorsKiyoshi Morimoto, Toshinori Takagi
Life of this patent
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Abstract
A process for preparing an organic film comprising the steps of ejecting an organic material in a gaseous state from an injection nozzle into a vacuum region to form clusters due to adiabatic expansion, subjecting the clusters to an intermediate state necessary for forming polymers due to abstraction and the like occurring in a part of atoms forming the clusters, and effecting polymerization reaction of the clusters on a substrate, thereby to form a dense organic film of a high quality and a high bonding strength.
Claims12
A process for preparing an organic film comprising:
- (a) heating an organic material in a closed crucible having at least one injection nozzle, thereby vaporizing said organic material;
- (b) injecting said vapor through said nozzle into a vacuum region to adiabatically expand said vapor so as to attain a supercooled state to form aggregated clusters of molecules of said vaporized organic material;
- (c) ionizing at least part of said clusters by irradiating said clusters with electron beams of several tens to about 300 volts with no more than about 100 mA, whereby a vapor stream containing ionized and unionized clusters is produced;
- (d) subjecting atoms forming said molecules of vaporized organic material in said vapor stream to abstraction, breakage, cleavage or recombination or a combination thereof by kinetic energy imparted to said vaporized organic material, thereby forming an intermediate state for forming an organic film;
- and
- (e) impinging said vapor stream containing ionized and unionized clusters on a substrate surface, thereby forming an organic film on said substrate.
3 more elements
Dependencies are inferred from the claim text.