Automotive, internal reference, solid electrolyte, lean oxygen sensor

In a thin film, internal reference, solid electrolyte oxygen sensor having laterally disposed galvanic sense and internal reference oxygen pump cells on a non-ionically and non-electrically conductive substrate in which

• the galvanic sense cell comprises an yttria stabilized zirconia solid electrolyte layer on the substrate with two overlaying thin film porous electrodes on its surface that are laterally disposed with respect to one another, so that the first electrode may contact an external measuring gas and the second electrode may contact an internal reference gas;
• the galvanic internal reference oxygen pump cell comprises an yttria stabilized zirconia solid electrolyte layer laterally, non-contiguously disposed on the substrate with respect to the sense cell electrolyte layer, with an overlaying porous electrode, so that the porous electrode may also contact the internal reference gas;
• and
• hermetically bonded to the substrate over the porous electrode of the pump cell and the second porous electrode of the sense cell, and a gas impermeable cap providing a chamber for the internal reference gas, by which the porous electrode of both the galvanic pump and sense cells is exposed to an identical predetermined internal reference oxygen pressure;
• the improvement wherein said porous electrode in the galvanic pump cell has a thickness of about 0.1 micron to about 1.0 micron, said yttria stabilized zirconia electrolyte layer has a thickness of about 0.1 micron to about 1.0 micron, and a second electrode that is a thin film of ceria with a thickness of about 0.01 micron to about 1.0 micron dispersed on the opposite side of said electrolyte layer with respect to said porous electrode, said ceria film layer which functions as an internal oxygen reservoir for said pump cell;
• and
• the internal reference chamber volume is less than about 9000 microns.sup.3, but greater than about 2500 microns.sup.3, and the maximum height of the cavity as determined between the top surface of the platinum electrode contained within the galvanic pump cell and the bottom surface of the impermeable cap being less than about 1.0 micron;
• effective to provide a miniature, rapid response, highly precise oxygen partial pressure detector suitable for detecting air/fuel ratios for internal combustion engines operating with lean air/fuel mixtures.